Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery

• US 9,447,499 B2
• Filed: 06/22/2012
• Issued: 09/20/2016
• Est. Priority Date: 06/22/2012
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Kashyap, Dhritiman Subha, Roy, Shambhu N., Burkhart, Vincent E., Solomon, Natan, Gopinath, Sanjay, Ashtiani, Kaihan Abidi, van Schravendijk, Bart, Stevens, Jason, Cohen, David
• Primary Examiner(s): Tran, Len
• Assistant Examiner(s): Rogers, Adam J
• Application Number:
  US13/531,254
• Publication Number:
  US 20130341433A1
• Time in Patent Office: 1,551 Days
• Field of Search: None
• US Class Current: 1/1
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas

Abstract

A dual-plenum showerhead for semiconductor processing operations is provided. The showerhead may include a faceplate with two sets of gas distribution holes, each set fed by a separate plenum. One set of gas distribution holes may be through-holes in the faceplate of the showerhead and may allow gases trapped between the faceplate and a plasma dome to flow towards a wafer. The other set of gas distribution holes may distribute gas routed through passages or channels in the faceplate towards the wafer. The passages or channels in the faceplate may include radial channels and annular channels and may be fed from an annular gas distribution channel about the periphery of the faceplate.

Claims

1. A faceplate for use in semiconductor processing showerhead, the faceplate comprising:

a volume with an outer surface, a top surface, a bottom surface, and a center axis, wherein the top surface and the bottom surface;

partially bound the volume,

are substantially parallel to, and offset from, each other, and

are substantially centered on, and normal to, the center axis, and

wherein the outer surface at least partially bounds the volume in a radial direction with respect to the center axis;

a plurality of first channels within the volume extending from the outer surface towards the center axis, each first channel having a first end closer to the center axis than a second end of that first channel;

a plurality of first gas distribution holes, each first gas distribution hole fluidly connected within the volume to one or more of the first channels and extending through the bottom surface and not extending through the top surface;

a plurality of second gas distribution holes, each second gas distribution hole extending through the top surface and the bottom surface and not fluidly connected within the volume to the first channels; and

one or more gas distribution channels fluidically connected with the second ends of the plurality of first channels, following a path around substantially all of the second gas distribution holes and around all of the second ends of the first channels, and configured to be fluidically connected with one or more gas feed inlets.

2. The faceplate of claim 1, further comprising:

a plurality of second channels within the volume, each second channel;

travelling in a substantially circumferential direction with respect to the center axis, and

fluidly connected within the volume to at least one first channel.

3. The faceplate of claim 2, wherein the second channels are concentric annular channels centered on the center axis.

4. The faceplate of claim 3, wherein the radial spacing between each set of neighboring second channels is substantially the same.

5. The faceplate of claim 1, wherein two or more of the first channels extend into the volume towards the center axis by different amounts.

6. The faceplate of claim 5, wherein the first channels extend into the volume towards the center axis along substantially radial paths.

7. The faceplate of claim 1, wherein each second gas distribution hole is chamfered where the second gas distribution hole intersects the top surface and where the second gas distribution hole intersects the bottom surface.

8. The faceplate of claim 1, wherein:

the first channels have a first average transverse cross-sectional area along their length,

the second channels have a second average transverse cross-sectional area along their length, and

the first average transverse cross-sectional area is substantially larger than the second average transverse cross-sectional area.

9. The faceplate of claim 8, wherein the first average transverse cross-sectional area is at least 80% larger than the second average transverse cross-sectional area.

10. The faceplate of claim 1, wherein each of the first channels is fluidly connected with one of the one or more gas distribution channels through a transition region of the first channel.

11. The faceplate of claim 10, wherein the transverse cross-sectional area of the transition region of each first channel is substantially less than the average transverse cross-sectional area of the first channel.

12. The faceplate of claim 6, wherein:

there are 24 first channels,

the first channels are arranged in a radial pattern about the center axis with substantially equal spacing.

13. The faceplate of claim 12, wherein:

the plurality of first gas distribution holes and the plurality of the second gas distribution holes are distributed across a substantially circular region of the bottom surface, the substantially circular region having a nominal radius R,

the first channels in a first subgroup of the first channels terminate at distances between 0% and 20% of R from the center axis,

the first channels in a second subgroup of the first channels terminate at distances between 15% and 35% of R from the center axis,

the first channels in a third subgroup of the first channels terminate at distances between 30% and 50% of R from the center axis,

the first channels in the first subgroup are arranged in a radial pattern about the center axis with substantially equal spacing,

the first channels in the second subgroup are arranged in a radial pattern about the center axis with substantially equal spacing, and

the first channels in the third subgroup are arranged in a radial pattern about the center axis with substantially equal spacing.

14. The faceplate of claim 11, wherein the transverse cross-sectional area of each transition region is less than 10% of the transverse cross-sectional area of the gas distribution channel with which the transition region is fluidly connected multiplied by the number of the first channels fluidly connected with that gas distribution channel divided by the number of the gas feed inlets fluidly connected with that gas distribution channel.

15. The faceplate of claim 14, wherein the transverse cross-sectional area of each transition region is less than 15% of the transverse cross-sectional area of the first channel for the transition region.

16. The faceplate of claim 1, wherein:

the first gas distribution holes are distributed in a pattern with substantially uniform density across the bottom surface, and

the second gas distribution holes are distributed in a pattern with substantially uniform density across the bottom surface.

17. The faceplate of claim 1, further comprising:

a first component, the first component including the top surface and a component bottom surface opposite the top surface; and

a second component, the second component including the bottom surface and a component top surface opposite the bottom surface, wherein;

the component bottom surface and the component top surface are mated together,

the first channels are formed by features in the component top surface, features in the component bottom surface, or features in both the component top surface and the component bottom surface, and

the first gas distribution holes are formed in the second component and extend through the component top surface.

18. The faceplate of claim 17, wherein the first component and the second component include features facilitating the use of threaded fasteners to clamp the first component to the second component in order to mate the component bottom surface and the component top surface.

19. The faceplate of claim 17, wherein the component bottom surface and the component top surface are bonded together.