Sensor device including one or more metal-dielectric optical filters
First Claim
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1. A sensor device comprising:
- one or more sensor elements; and
one or more optical filters disposed over the one or more sensor elements, wherein each of the one or more optical filters includes;
a plurality of dielectric layers; and
a plurality of metal layers stacked in alternation with the plurality of dielectric layers, whereineach of the plurality of metal layers has a tapered edge, at a periphery of the optical filter, that is encapsulated by one or more of the plurality of the dielectric layers, andeach of the plurality of metal layers is separated from a substrate of an optical filter, of the one or more optical filters, using at least one of the plurality of dielectric layers.
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Abstract
A sensor device including one or more sensor elements and one or more optical filters is provided. The one or more optical filters each include a plurality of dielectric layers and a plurality of metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.
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20 Claims
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1. A sensor device comprising:
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one or more sensor elements; and one or more optical filters disposed over the one or more sensor elements, wherein each of the one or more optical filters includes; a plurality of dielectric layers; and a plurality of metal layers stacked in alternation with the plurality of dielectric layers, wherein each of the plurality of metal layers has a tapered edge, at a periphery of the optical filter, that is encapsulated by one or more of the plurality of the dielectric layers, and each of the plurality of metal layers is separated from a substrate of an optical filter, of the one or more optical filters, using at least one of the plurality of dielectric layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification