Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor

• US 9,449,795 B2
• Filed: 04/08/2013
• Issued: 09/20/2016
• Est. Priority Date: 02/28/2013
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Sabri, Mohamed, Augustyniak, Edward, Keil, Douglas L., Lingampalli, Ramkishan Rao, Leeser, Karl, Barnett, Cody
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US13/858,477
• Publication Number:
  US 20140238608A1
• Time in Patent Office: 1,261 Days
• Field of Search: 118/723.E, 156/345.43, 156/345.46, 156/345.47
• US Class Current: 1/1
• CPC Class Codes: C23C 16/505 using radio frequency discharges
• CPC Class Codes: C23C 16/509 using internal electrodes
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/3244 Gas supply means

Abstract

A showerhead assembly for a substrate processing system includes a back plate connected to a gas channel. A face plate is connected adjacent to a first surface of the back plate and includes a gas diffusion surface. An electrode is arranged in one of the back plate and the face plate and is connected to one or more conductors. A gas plenum is defined between the back plate and the face plate and is in fluid communication with the gas channel. The back plate and the face plate are made of a non-metallic material.

Claims

1. A showerhead assembly for a substrate processing system, comprising:

back plate connected to a gas channel;

a face plate connected adjacent to a first surface of the back plate and including a gas diffusion surface;

one or more conductors; and

an electrode embedded within the back plate and connected to the one or more conductors,

wherein at least one of a bottom surface of the back plate and a top surface of the face plate includes a recess such that a gas plenum (i) is defined in the recess between the back plate and the face plate below the electrode and (ii) is in fluid communication with the gas channel, and

wherein the back plate and the face plate are made of a non-metallic material.

2. The showerhead assembly of claim 1, further comprising

a stem connected to the back plate and defining the gas channel,

wherein the stem is made of a non-metallic material, and

wherein the one or more conductors pass through the stem.

3. The showerhead assembly of claim 1, wherein one of:

the gas diffusion surface of the face plate includes spaced holes;

the gas diffusion surface of the face plate includes perforations;

or

the gas diffusion surface of the face plate is porous.

4. The showerhead assembly of claim 2, further comprising a plasma-suppressing structure arranged adjacent to a second surface of the back plate, wherein the first surface of the back plate is opposite to the second surface of the back plate.

5. The showerhead assembly of claim 4, wherein the plasma-suppressing structure includes N plates located parallel to each other in a spaced relationship, where N is an integer greater than one, wherein the N plates are made of a dielectric material.

6. The showerhead assembly of claim 5, wherein the plasma-suppressing structure includes a collar extending from one of the N plates towards an upper surface of a processing chamber of the substrate processing system, and wherein the collar is made of a dielectric material.

7. The showerhead assembly of claim 5, wherein N is greater than two and the N plates are spaced in a uniform manner.

8. The showerhead assembly of claim 5, wherein N is greater than two and at least some of the N plates are spaced in a non-uniform manner.

9. The showerhead assembly of claim 5, wherein at least one of the N plates includes a plurality of perforations.

10. The showerhead assembly of claim 5, wherein at least one of the N plates includes a saw tooth surface.

11. The showerhead assembly of claim 2, wherein the stem, the back plate and the face plate are made of a ceramic material.

12. The showerhead assembly of claim 2, wherein the stem, the back plate and the face plate are made of at least one of aluminum nitride and aluminum oxide.

13. The showerhead assembly of claim 1, further comprising a baffle arranged between the gas channel and the gas plenum.

14. The showerhead assembly of claim 2, further comprising a collar connecting the stem to an upper surface of a substrate processing chamber.

15. The showerhead assembly of claim 1, wherein the face plate is connected to the back plate to allow lateral movement of the face plate relative to the back plate while maintaining a seal therebetween.

16. The showerhead assembly of claim 1, wherein a height dimension of the gas plenum is less than twice an expected plasma sheath thickness.

17. The showerhead assembly of claim 1, wherein a first dimension between the electrode and the first surface of the back plate is less than a second dimension between the electrode and a second surface of the back plate, wherein the first surface of the back plate is opposite to the second surface of the back plate.

18. The showerhead assembly of claim 1, wherein the electrode is disc-shaped.

19. The showerhead assembly of claim 2, wherein the one or more conductors includes a cylindrically-shaped conductor that surrounds the gas channel.

20. A substrate processing system comprising:

a processing chamber including a reaction volume;

the showerhead assembly of claim 1 arranged in the reaction volume; and

a pedestal arranged in the reaction volume adjacent to the face plate.

21. The substrate processing system of claim 20, further comprising:

a radio frequency (RF) circuit configured to supply an RF signal to the one or more conductors having a frequency greater than 1 MHz; and

a controller configured to control process gases flowing to the gas channel and to control operation of the RF circuit.

22. The substrate processing system of claim 21, wherein the back plate is directly connected to a wall of the processing chamber.