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Method of forming an inductor with magnetic material

  • US 9,449,917 B2
  • Filed: 05/24/2015
  • Issued: 09/20/2016
  • Est. Priority Date: 03/14/2013
  • Status: Active Grant
First Claim
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1. A method for forming a semiconductor device, the method comprising:

  • receiving a device comprising a first substrate and a first dielectric layer over the first substrate, the first dielectric layer having a first conductive pattern;

    receiving an interposer comprising a second substrate and a second dielectric layer over the second substrate, the second dielectric layer having a second conductive pattern;

    forming a first magnetic layer on at least one of the interposer and the device;

    forming a second magnetic layer on at least one of the interposer and the device, the second magnetic layer being a different layer than the first magnetic layer; and

    bonding the device to the interposer using conductive bumps, wherein at least one of the conductive bumps electrically couples the first conductive pattern to the second conductive pattern to form a coil, and wherein the first magnetic layer and the second magnetic layer are interposed between the first conductive pattern and the second conductive pattern after the bonding.

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