Photosensor and display device
First Claim
Patent Images
1. A photosensor comprising:
- a photoelectric conversion element including a photoelectric conversion layer, the photoelectric conversion layer including silicon; and
an amplifier circuit including a thin film transistor, the thin film transistor comprising;
an oxide semiconductor layer;
buffer layers; and
a source electrode and a drain electrode electrically connected to the oxide semiconductor layer with the buffer layers therebetween,wherein the oxide semiconductor layer and the buffer layers comprise indium, gallium, and zinc,wherein a ratio of indium, gallium, and zinc in the oxide semiconductor layer is the same as that in the buffer layers,wherein the oxide semiconductor layer is richer in oxygen than the buffer layers, andwherein the buffer layers consist of non-single crystalline oxide semiconductor including nanocrystal structure.
1 Assignment
0 Petitions
Accused Products
Abstract
Thin film transistors including an oxide semiconductor containing indium, gallium, and zinc are easily arranged in a matrix over a large substrate and have small characteristic variations. With amplifier circuits and driver circuits of display elements which include the thin film transistors including an oxide semiconductor containing indium, gallium, and zinc with small characteristic variations, intensity distribution of light received by the photodiodes arranged in a matrix is converted into electrical signals with high reproducibility and output, and the display elements arranged in a matrix can be uniformly driven.
165 Citations
23 Claims
-
1. A photosensor comprising:
-
a photoelectric conversion element including a photoelectric conversion layer, the photoelectric conversion layer including silicon; and an amplifier circuit including a thin film transistor, the thin film transistor comprising; an oxide semiconductor layer; buffer layers; and a source electrode and a drain electrode electrically connected to the oxide semiconductor layer with the buffer layers therebetween, wherein the oxide semiconductor layer and the buffer layers comprise indium, gallium, and zinc, wherein a ratio of indium, gallium, and zinc in the oxide semiconductor layer is the same as that in the buffer layers, wherein the oxide semiconductor layer is richer in oxygen than the buffer layers, and wherein the buffer layers consist of non-single crystalline oxide semiconductor including nanocrystal structure. - View Dependent Claims (2, 3)
-
-
4. A photosensor comprising:
-
a photoelectric conversion element including a photoelectric conversion layer, the photoelectric conversion layer comprising; a first semiconductor layer including an impurity element having one conductivity type; a second semiconductor layer in contact with the first semiconductor layer; and a third semiconductor layer in contact with the second semiconductor layer, wherein the third semiconductor layer includes an impurity element having a conductivity type opposite to the conductivity type of the first semiconductor layer; and an amplifier circuit including at least a selection thin film transistor, an amplifying thin film transistor, and a reset thin film transistor, each thin film transistor comprising; an oxide semiconductor layer; buffer layers; and a source electrode and a drain electrode electrically connected to the oxide semiconductor layer with the buffer layers therebetween, wherein the oxide semiconductor layer and the buffer layers comprise indium, gallium, and zinc, wherein a ratio of indium, gallium, and zinc in the oxide semiconductor layer is the same as that in the buffer layers, wherein the oxide semiconductor layer is richer in oxygen than the buffer layers, wherein a gate electrode of the reset thin film transistor is electrically connectable to a reset gate signal line, wherein one of the source electrode and the drain electrode of the reset thin film transistor is electrically connectable to a sensor power supply line, wherein the other one of the source electrode and the drain electrode of the reset thin film transistor is electrically connectable to a gate electrode of the amplifying thin film transistor and one of an anode and a cathode of the photoelectric conversion element, wherein one of the source electrode and the drain electrode of the amplifying thin film transistor is electrically connectable to the sensor power supply line, wherein one of the source electrode and the drain electrode of the selection thin film transistor is electrically connectable to a sensor output wiring, wherein the other one of the source electrode and the drain electrode of the selection thin film transistor is electrically connectable to the other one of the source electrode and the drain electrode of the amplifying thin film transistor, wherein a gate electrode of the selection thin film transistor is electrically connectable to a sensor gate signal line, and wherein the buffer layers consist of non-single crystalline oxide semiconductor including nanocrystal structure. - View Dependent Claims (5, 6, 7)
-
-
8. An area sensor comprising:
-
a plurality of pixels, each of the plurality of pixels comprising; a photoelectric conversion element including a photoelectric conversion layer, the photoelectric conversion layer comprising; a first semiconductor layer including an impurity element having one conductivity type; a second semiconductor layer in contact with the first semiconductor layer; and a third semiconductor layer in contact with the second semiconductor layer, wherein the third semiconductor layer includes an impurity element having a conductivity type opposite to the conductivity type of the first semiconductor layer; and an amplifier circuit including at least a selection thin film transistor, an amplifying thin film transistor, and a reset thin film transistor, each thin film transistor comprising; an oxide semiconductor layer; buffer layers; and a source electrode and a drain electrode electrically connected to the oxide semiconductor layer with the buffer layers therebetween, wherein the oxide semiconductor layer and the buffer layers comprise indium, gallium, and zinc, wherein a ratio of indium, gallium, and zinc in the oxide semiconductor layer is the same as that in the buffer layers, wherein the oxide semiconductor layer is richer in oxygen than the buffer layers, wherein a gate electrode of the reset thin film transistor is electrically connectable to a reset gate signal line, wherein one of the source electrode and the drain electrode of the reset thin film transistor is electrically connectable to a sensor power supply line, wherein the other one of the source electrode and the drain electrode of the reset thin film transistor is electrically connectable to a gate electrode of the amplifying thin film transistor and one of an anode and a cathode of the photoelectric conversion element, wherein one of the source electrode and the drain electrode of the amplifying thin film transistor is electrically connectable to the sensor power supply line, wherein one of the source electrode and the drain electrode of the selection thin film transistor is electrically connectable to a sensor output wiring, wherein the other one of the source electrode and the drain electrode of the selection thin film transistor is electrically connectable to the other one of the source electrode and the drain electrode of the amplifying thin film transistor, wherein a gate electrode of the selection thin film transistor is electrically connectable to a sensor gate signal line, and wherein the buffer layers consist of non-single crystalline oxide semiconductor including nanocrystal structure. - View Dependent Claims (9, 10, 11)
-
-
12. A display device comprising:
-
a plurality of pixels, each of the plurality of pixels comprising; an electrode layer; a photoelectric conversion element including a photoelectric conversion layer being in contact with the electrode layer, the photoelectric conversion layer including silicon; an amplifier circuit; a display element; and a driver circuit of the display element, wherein the amplifier circuit and the driver circuit each include a thin film transistor, each thin film transistor comprising; an oxide semiconductor layer; buffer layers; and a source electrode and a drain electrode electrically connected to the oxide semiconductor layer with the buffer layers therebetween, wherein the oxide semiconductor layer and the buffer layers comprise indium, gallium, and zinc, wherein a ratio of indium, gallium, and zinc in the oxide semiconductor layer is the same as that in the buffer layers, wherein the oxide semiconductor layer is richer in oxygen than the buffer layers, and wherein the buffer layers consist of non-single crystalline oxide semiconductor including nanocrystal structure. - View Dependent Claims (13, 14, 15, 16, 17)
-
-
18. A display device comprising:
-
an electrode layer; and a plurality of pixels, each of the plurality of pixels comprising; a photoelectric conversion element including a photoelectric conversion layer, the photoelectric conversion layer comprising; a first semiconductor layer including an impurity element having one conductivity type; a second semiconductor layer in contact with the first semiconductor layer; and a third semiconductor layer in contact with the second semiconductor layer and in contact with the electrode layer, wherein the third semiconductor layer includes an impurity element having a conductivity type opposite to the conductivity type of the first semiconductor layer; an amplifier circuit including at least a selection thin film transistor, an amplifying thin film transistor, and a reset thin film transistor, each thin film transistor comprising; a first oxide semiconductor layer; buffer layers; and a source electrode and a drain electrode electrically connected to the first oxide semiconductor layer with the buffer layers therebetween, a display element; and a driver circuit of the display element including at least a switching thin film transistor including a second oxide semiconductor layer, wherein the first oxide semiconductor layer, the second oxide semiconductor layer and the buffer layers comprise indium, gallium, and zinc, wherein a ratio of indium, gallium, and zinc in the first oxide semiconductor layer is the same as that in the buffer layers, wherein the first oxide semiconductor layer and the second oxide semiconductor layer are richer in oxygen than the buffer layers, wherein a gate electrode of the reset thin film transistor is electrically connectable to a reset gate signal line, wherein one of the source electrode and the drain electrode of the reset thin film transistor is electrically connectable to a sensor power supply line, wherein the other one of the source electrode and the drain electrode of the reset thin film transistor is electrically connectable to a gate electrode of the amplifying thin film transistor and one of an anode and a cathode of the photoelectric conversion element, wherein one of the source electrode and the drain electrode of the amplifying thin film transistor is electrically connectable to the sensor power supply line, wherein one of the source electrode and the drain electrode of the selection thin film transistor is electrically connectable to a sensor output wiring, wherein the other one of the source electrode and the drain electrode of the selection thin film transistor is electrically connectable to the other one of the source electrode and the drain electrode of the amplifying thin film transistor, and wherein a gate electrode of the selection thin film transistor is electrically connectable to a sensor gate signal line, wherein a gate electrode of the switching thin film transistor is electrically connectable to a gate signal line, and wherein one of the source electrode and the drain electrode of the switching thin film transistor is electrically connectable to a source signal line, and wherein the buffer layers consist of non-single crystalline oxide semiconductor including nanocrystal structure. - View Dependent Claims (19, 20, 21, 22, 23)
-
Specification