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Gyroscope structure and gyroscope

  • US 9,452,921 B2
  • Filed: 09/09/2014
  • Issued: 09/27/2016
  • Est. Priority Date: 09/11/2013
  • Status: Active Grant
First Claim
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1. A microelectromechanical gyroscope structure, comprising:

  • a first seismic mass including a planar surface;

    a second seismic mass including a planar surface;

    a first spring structure for suspending the first seismic mass and the second seismic mass on another body element in a parallel position, wherein the planar surface of the first seismic mass and the planar surface of the second seismic mass form a reference plane of masses;

    excitation means;

    detection means;

    whereinthe first spring structure includes a first anchor point within the plane of the first seismic mass for attaching the first seismic mass to the other body element, and a first spring assembly attached to the first anchor point and the first seismic mass, which first spring assembly enables rotary oscillation of the first seismic mass about a first excitation axis that is parallel to the plane of masses;

    the first spring structure includes a second anchor point within the plane of the second seismic mass for attaching the second seismic mass to the other body element, and a second spring assembly attached to the second anchor point and the second seismic mass, which second spring assembly enables rotary oscillation of the second seismic mass about a second excitation axis that is parallel to the plane of masses;

    the first excitation axis and the second excitation axis are aligned to a common primary axis;

    the first spring assembly enables rotary oscillation of the first seismic mass about a first detection axis that is perpendicular to the plane of masses;

    the second spring assembly enables rotary oscillation of the second seismic mass about a second detection axis that is perpendicular to the plane of masses;

    the first detection axis and the second detection axis are separated by a non-zero distance;

    the excitation means are configured to drive the first seismic mass and the second seismic mass to oscillate about the common primary axis;

    the detection means include at least one detector element with an in-plane detection comb and a second spring structure for transforming the rotary oscillation of the first seismic mass or of the second seismic mass into linear oscillation of the in-plane detection comb in the plane of masses in a direction parallel to the common primary axis;

    the detection means are configured to detect the linear oscillation of the in-plane detection comb.

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