Capacitive type 6-axial force/torque sensor
First Claim
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1. A capacitive type sensor comprising:
- a circuit board;
electrodes formed on a first surface of the circuit board; and
an electrode plate disposed above the circuit board,wherein the electrodes comprise N pairs of linear electrodes disposed along radii of the circuit board, and the N pairs of linear electrodes are spaced apart from each other at intervals of 360°
/N along the radii of the circuit board,wherein N is an integer which is 3 or more.
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Abstract
A capacitive type sensor includes a circuit board, electrodes formed on a first surface of the circuit board, and an electrode plate disposed above the circuit board, wherein the electrodes comprise pairs of electrodes disposed from a distance from a center of the circuit board, and the pairs of electrodes being spaced apart from each other.
13 Citations
20 Claims
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1. A capacitive type sensor comprising:
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a circuit board; electrodes formed on a first surface of the circuit board; and an electrode plate disposed above the circuit board, wherein the electrodes comprise N pairs of linear electrodes disposed along radii of the circuit board, and the N pairs of linear electrodes are spaced apart from each other at intervals of 360°
/N along the radii of the circuit board,wherein N is an integer which is 3 or more. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A capacitive type sensor comprising:
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a circular circuit board; electrodes formed on a first surface of the circular circuit board; a circular electrode plate disposed above the circuit board; and an air gap formed between the first surface of the circular circuit board and the circular electrode plate, wherein the electrodes comprise N pairs of linear electrodes disposed along radii of the circular circuit board, and the N pairs of linear electrode are spaced apart from each other to divide the circular circuit board into N equal parts, wherein N is an integer which is 3 or more. - View Dependent Claims (18, 19, 20)
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Specification