Nano sensor
DCFirst Claim
Patent Images
1. A device, comprising:
- an upper metallic layer,a lower layer,a nano sensor array positioned between the upper and lower layers to detect a presence of a gas, a chemical, or a biological object, wherein each sensor'"'"'s electrical characteristic changes when encountering the gas, chemical or biological object, anda matrix film on the nano sensor array wherein a physical parameter of the matrix film changes to measure gas or liquid concentration.
2 Assignments
Litigations
0 Petitions
Accused Products
Abstract
A device includes an upper metallic layer, a lower layer, and a nano sensor array positioned between the upper and lower layers to detect a presence of a gas, a chemical, or a biological object, wherein each sensor'"'"'s electrical characteristic changes when encountering the gas, chemical or biological object.
-
Citations
20 Claims
-
1. A device, comprising:
-
an upper metallic layer, a lower layer, a nano sensor array positioned between the upper and lower layers to detect a presence of a gas, a chemical, or a biological object, wherein each sensor'"'"'s electrical characteristic changes when encountering the gas, chemical or biological object, and a matrix film on the nano sensor array wherein a physical parameter of the matrix film changes to measure gas or liquid concentration. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
-
-
19. A device, comprising:
-
an upper metallic layer, a lower layer, and a resistive, optical or magnetic nano sensor positioned between the upper and lower layers wherein nanoparticles form a conduction path between the upper and lower layers, and a matrix film on the nanoparticles, wherein a physical parameter of the matrix film changes to measure gas or liquid concentration.
-
-
20. A electronic device, comprising:
-
a first layer fabricated in silicon using semiconductor fabrication techniques; a second layer formed next to the first layer to provide data storage, the second layer having a lower layer formed next to the first layer;
a resistive sensor element; and
an upper layer formed next to the resistive element, wherein resistance changes when encountering a gas, a chemical, or a biological object, anda matrix film on the second layer wherein a physical parameter of the matrix film changes to measure gas or liquid concentration.
-
Specification