Testing holders for chip unit and die package

• US 9,453,877 B2
• Filed: 04/13/2016
• Issued: 09/27/2016
• Est. Priority Date: 03/14/2013
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Wang, Mill-Jer, Liu, Kuo-Chuan, Peng, Ching-Nen, Lin, Hung-Chih, Chen, Hao
• Primary Examiner(s): Assouad, Patrick
• Assistant Examiner(s): CURTIS, SEAN M
• Application Number:
  US15/098,037
• Publication Number:
  US 20160223584A1
• Time in Patent Office: 167 Days
• Field of Search: 324/756.02, 324/756.07, 279/4.06, 279/14, 279/906
• US Class Current: 1/1
• CPC Class Codes: G01R 1/0483 Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips for IC's with connecting points around the edges only G01R1/0433
• CPC Class Codes: G01R 1/06722 Spring-loaded
• CPC Class Codes: G01R 31/2867 Handlers or transport devices, e.g. loaders, carriers, trays
• CPC Class Codes: G01R 31/2875 related to heating
• CPC Class Codes: G01R 31/2893 Handling, conveying or loading, e.g. belts, boats, vacuum fingers G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H01L21/67
• CPC Class Codes: G01R 31/318513 Test of Multi-Chip-Moduls

Abstract

A testing holder for a chip unit, a multi site holding frame for plural chip units and a method for testing a die thereof are provided. The proposed multi site holding frame for testing plural chip units simultaneously includes a first holder frame having a plurality of testing holders. Each of the plurality of testing holders includes a holder body containing a specific one of the plural chip units, and a pressure releasing device formed on the holder body to release an insertion pressure when the specific one of the plural chip units is inserted in the holder body.

Claims

1. A testing holder for a chip unit, comprising:

a holder body containing the chip unit; and

a pressure releasing device formed on the holder body to release an insertion pressure when the chip unit is inserted in the holder body,

wherein the holder body comprises a bottom plate,

the chip unit includes a bottom surface facing the bottom plate,

wherein the bottom plate comprises one set of a first set of plural pogo pins and a second set of plural soft spacers for absorbing a contact stress from the insertion.

2. The testing holder of claim 1, wherein the holder body further comprises a surrounding wall, the chip unit is a diced chip of a 3DIC, and the surrounding wall defines an inner space for containing and testing the diced chip.

3. The testing holder of claim 2, wherein the surrounding wall further has a tilted surface to guide therein an insertion of the diced chip and to avoid an edge scratch on the diced chip, and the diced chip is one selected from a group consisting of a package on package (PoP), a die package and a die without package.

4. The testing holder of claim 3, wherein the die without package can be stacked on a dummy die to provide an added height.

5. The testing holder of claim 2, wherein the surrounding wall has an upper surrounding wall including a first and a second openings with a first size and a lower surrounding wall including a third opening with a second size, the upper surrounding wall and the lower surrounding wall are connected by plural guide pins, the diced chip has a third size and is insertable into the holder body via the first, the second, and the third openings, and the first size is equal to the third size to fix the inserted diced chip.

6. The testing holder of claim 2, wherein the testing holder has an outer dimension kept unchanged and an inner dimension adapted to a size of the diced chip, the test contactor being one selected from a group consisting of a bump, a probing pad, a contactless coil, a hybrid contactless, and a combination thereof, and the diced chip is tested through the test contactor while the diced chip is inserted into the testing holder.

7. A testing holder for a chip unit, comprising:

a holder body containing the chip unit; and

a pressure releasing device formed on the holder body to release an insertion pressure when the chip unit is inserted in the holder body,

wherein the holder body comprises a bottom plate,

the chip unit includes a bottom surface facing the bottom plate,

wherein the bottom plate is a heat conduct plate having a hole being the pressure releasing device.

8. The testing holder of claim 7, wherein the holder body further comprises a surrounding wall, the chip unit is a diced chip of a 3DIC, and the surrounding wall defines an inner space for containing and testing the diced chip.

9. The testing holder of claim 8, wherein the surrounding wall further has a tilted surface to guide therein an insertion of the diced chip and to avoid an edge scratch on the diced chip, and the diced chip is one selected from a group consisting of a package on package (PoP), a die package and a die without package.

10. The testing holder of claim 9, wherein the die without package can be stacked on a dummy die to provide an added height.

11. The testing holder of claim 8, wherein the holder body further comprises a porous metal plate absorbing a stress from the insertion of the chip unit to prevent a warpage of the chip unit, the porous metal plate is disposed on the heat conduct plate, and the surrounding wall is disposed on the porous metal plate.

12. The testing holder of claim 8, wherein the surrounding wall has an upper surrounding wall including a first and a second openings with a first size and a lower surrounding wall including a third opening with a second size, the upper surrounding wall and the lower surrounding wall are connected by plural guide pins, the diced chip has a third size and is insertable into the holder body via the first, the second, and the third openings, and the first size is equal to the third size to fix the inserted diced chip.

13. The testing holder of claim 8, wherein the testing holder has an outer dimension kept unchanged and an inner dimension adapted to a size of the diced chip, the test contactor being one selected from a group consisting of a bump, a probing pad, a contactless coil, a hybrid contactless, and a combination thereof, and the diced chip is tested through the test contactor while the diced chip is inserted into the testing holder.

14. A testing holder for a chip unit, comprising:

a holder body containing the chip unit; and

a pressure releasing device formed on the holder body to release an insertion pressure when the chip unit is inserted in the holder body,

wherein the holder body comprises a bottom plate,

the chip unit includes a bottom surface facing the bottom plate, and a surrounding wall, the surrounding wall defines an inner space for containing and testing the chip unit, and

the holder body further comprises a porous metal plate absorbing a stress from the insertion of the chip unit to prevent a warpage of the chip unit, wherein the bottom plate is a heat conduct plate, the porous metal plate is disposed on the heat conduct plate, and the surrounding wall is disposed on the porous metal plate.

15. The testing holder of claim 14, wherein the chip unit is a diced chip of a 3DIC.

16. The testing holder of claim 14, wherein the surrounding wall further has a tilted surface to guide therein an insertion of the diced chip and to avoid an edge scratch on the diced chip, and the diced chip is one selected from a group consisting of a package on package (PoP), a die package and a die without package.

17. The testing holder of claim 16, wherein the die without package can be stacked on a dummy die to provide an added height.

18. The testing holder of claim 14, wherein the surrounding wall has an upper surrounding wall including a first and a second openings with a first size and a lower surrounding wall including a third opening with a second size, the upper surrounding wall and the lower surrounding wall are connected by plural guide pins, the diced chip has a third size and is insertable into the holder body via the first, the second, and the third openings, and the first size is equal to the third size to fix the inserted diced chip.

19. The testing holder of claim 14, wherein the testing holder has an outer dimension kept unchanged and an inner dimension adapted to a size of the diced chip, the test contactor being one selected from a group consisting of a bump, a probing pad, a contactless coil, a hybrid contactless, and a combination thereof, and the diced chip is tested through the test contactor while the diced chip is inserted into the testing holder.

20. The testing holder of claim 14, wherein the surrounding wall further has a trench being the pressure releasing device.