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Edge crack detection system

  • US 9,454,684 B2
  • Filed: 05/28/2014
  • Issued: 09/27/2016
  • Est. Priority Date: 05/28/2014
  • Status: Active Grant
First Claim
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1. A method of detecting edge cracks in a die under test, comprising:

  • providing a command signal regarding a radio frequency identification (RFID) tag'"'"'s response using an RFID reader;

    completely encircling a die under test using an antenna of the RFID tag disposed outside a seal ring surrounding the entire periphery of the die under test;

    using the RFID tag to receive the command signal and produce power from the command signal;

    providing a response signal using the RFID tag based on the command signal;

    receiving the response signal and providing the command signal regarding the RFID tag'"'"'s self-destruction based on the response signal using the RFID reader; and

    receiving the command signal and self-destructing based on the command signal using the RFID tag.

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