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Enhanced stereo imaging-based metrology

  • US 9,454,816 B2
  • Filed: 10/22/2014
  • Issued: 09/27/2016
  • Est. Priority Date: 10/23/2013
  • Status: Active Grant
First Claim
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1. A computer-implemented method of evaluating an object, the method comprising:

  • for each of at least three different instants;

    concurrently acquiring first image data of the object using a first camera and second image data of the object using a second camera;

    a computer system processing the first and second image data to identify a shared point of the object visible in both the first and second image data; and

    the computer system calculating a physical three-dimensional location of the identified shared point using the first and second image data;

    the computer system calculating a physical three-dimensional location of an exclusive point of the object visible only in one of the first or second image data for each of the three different instants using the one of the first or second image data and the physical three-dimensional location of the shared point at each of the three different instants; and

    the computer system evaluating the object using the physical three-dimensional locations of the shared point and the exclusive point.

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