Carbon nanotube or graphene based pressure switch

• US 9,455,105 B2
• Filed: 09/23/2011
• Issued: 09/27/2016
• Est. Priority Date: 09/27/2010
• Status: Active Grant

• Current Assignee: Kulite Semiconductor Products Inc
• Original Assignee: Kulite Semiconductor Products Inc
• Inventors: Hurst, Adam, DeRosa, Lou
• Primary Examiner(s): Luebke, Renee
• Assistant Examiner(s): SAEED, AHMED M
• Application Number:
  US13/241,988
• Publication Number:
  US 20120073948A1
• Time in Patent Office: 1,831 Days
• Field of Search: 200/17.R, 200/182, 257415-420, 737/00, 737/15, 737/53
• US Class Current: 1/1
• CPC Class Codes: H01H 2300/036 Application nanoparticles, e.g. nanotubes, integrated in switch components, e.g. contacts, the switch itself being clearly of a different scale, e.g. greater than nanoscale
• CPC Class Codes: H01H 35/26 Details
• CPC Class Codes: Y10T 29/49105 Switch making

Abstract

The present invention describes systems and methods for providing a carbon or graphene based pressure switch. An exemplary embodiment of the present invention includes a semiconductor substrate; a cavity defined within the semiconductor substrate having a cross-sectional area and a depth; a bottom conductor disposed within the cavity; a conductive membrane disposed above the cavity and adapted to deflect towards the bottom conductor upon an applied pressure; an elastic, insulating layer disposed between the conductive membrane and the bottom conductor; and a switching element adapted to activate upon electrical communication between the conductive membrane and the bottom conductor.

Claims

1. A pressure switch assembly, comprising:

a semiconductor substrate;

a cavity defined within the semiconductor substrate having a cross-sectional area and a depth;

a bottom conductor disposed within the bottom of the cavity, wherein the bottom conductor has a top surface;

a conductive membrane disposed above the cavity, wherein the conductive membrane has a bottom surface, and wherein the conductive membrane is configured to deflect toward the top surface of the bottom conductor upon an applied fluid pressure;

an insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor; and

a switching element, wherein the switching element is configured to activate upon sufficient deflection of the conductive membrane toward the top surface of the bottom conductor such that electron tunneling through the insulating layer produces sufficient electrical communication between the conductive membrane and the bottom conductor to activate the switching element.

2. The pressure switch assembly of claim 1, wherein the conductive membrane is made from carbon nanotubes.

3. The pressure switch assembly of claim 1, wherein the conductive membrane is made from graphene.

4. The pressure switch assembly of claim 1, further comprising an insulating layer disposed on the surface of the semiconductor substrate.

5. The pressure switch assembly of claim 4, further comprising a top conductor pad disposed on the insulating layer.

6. The pressure switch assembly of claim 1, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is elastic.

7. The pressure switch assembly of claim 1, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is sufficiently thin to allow electron tunneling between the conductive membrane and the bottom conductor.

8. The pressure switch assembly of claim 7, wherein the insulating layer disposed between the bottom surface of the conductive membrane and the top surface of the bottom conductor is made of parylene.

9. The pressure switch assembly of claim 1, further comprising an isolation diaphragm encapsulating the conductive membrane.

10. The pressure switch assembly of claim 9, wherein the isolation diaphragm is made of metal.

11. The pressure switch assembly of claim 9, further comprising an incompressible liquid disposed between the isolation diaphragm and the conductive membrane.

12. The pressure switch assembly of claim 11, wherein the incompressible liquid comprises molecules having sizes that are too large to penetrate the membrane.

13. The pressure switch assembly of claim 1, wherein the cavity has a shape that is substantially rectangular.

14. The pressure switch assembly of claim 1, wherein the cavity has a shape that is substantially circular.

15. A method of indicating whether a fluid pressure exerted by a medium is above a certain threshold pressure comprising:

applying the fluid pressure to a conductive membrane suspended across a cavity, wherein the cavity has a geometry and a cavity bottom having a top surface, and wherein the fluid pressure causes the conductive membrane to deflect toward the top surface of the cavity bottom;

creating an electrical potential difference between the conductive membrane and the cavity bottom; and

upon the conductive membrane sufficiently deflecting toward the top surface of the cavity bottom such that sufficient current flows between the conductive membrane and the cavity bottom, activating a load, wherein a substantial increase in current sufficient to activate the load indicates the fluid pressure is above the threshold pressure.

16. The method of claim 15, wherein the substantial increase in the current is an exponential increase.

17. The method of claim 15, further comprising reversing a polarity of the electrical potential difference to counteract van der Waals'"'"' forces between the conductive membrane and the cavity bottom.

18. The method of claim 15, wherein applying the fluid pressure to a conductive membrane further comprises physically isolating the conductive membrane from the medium.

19. The method of claim 18, wherein physically isolating the conductive membrane from the medium means transferring the fluid pressure to the membrane via an isolation diaphragm and an incompressible liquid.

20. The method of claim 15, further comprising setting the threshold pressure by adjusting a distance between the conductive membrane and the cavity bottom.