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Micromachined piezoelectric x-axis gyroscope

  • US 9,459,099 B2
  • Filed: 07/31/2013
  • Issued: 10/04/2016
  • Est. Priority Date: 04/30/2010
  • Status: Active Grant
First Claim
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1. A method of fabricating a gyroscope, comprising:

  • depositing conductive material on a substrate;

    forming a sense frame;

    forming a proof mass disposed outside the sense frame;

    forming a pair of anchors;

    forming a plurality of drive beams disposed on opposing sides of the sense frame and between the pair of anchors, the drive beams connecting the sense frame to the proof mass, each of the drive beams including a piezoelectric layer and capable of causing drive motions of the proof mass, the drive motions being torsional oscillations substantially in a plane of the drive beams; and

    forming a plurality of sense beams including a layer of piezoelectric sense electrodes, the sense beams capable of connecting the sense frame to the pair of anchors,wherein forming the plurality of drive beams includes the following;

    depositing a first metal layer that is in contact with the conductive material;

    depositing a piezoelectric layer on the first metal layer;

    depositing a second metal layer on the piezoelectric layer; and

    forming a third metal layer on the second metal layer.

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