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Silicon force sensor and method of using the same

  • US 9,459,161 B1
  • Filed: 06/01/2016
  • Issued: 10/04/2016
  • Est. Priority Date: 10/28/2013
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • applying a compressive preload to a piezoresistive device, wherein the compressive preload is greater in magnitude than an operating range of operational loads;

    transmitting an operational load within the operating range to the piezoresistive device so as to produce a reduction in the compressive preload; and

    measuring the reduction in the compressive preload to facilitate determining a magnitude of the operational load.

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