Shielded three-terminal flat-through EMI/energy dissipating filter with co-fired hermetically sealed feedthrough

• US 9,463,329 B2
• Filed: 12/01/2014
• Issued: 10/11/2016
• Est. Priority Date: 03/20/2008
• Status: Active Grant

• Current Assignee: Greatbatch Limited (Greatbatch Incorporated)
• Original Assignee: Greatbatch Limited (Greatbatch Incorporated)
• Inventors: Frysz, Christine A., Stevenson, Robert A., Marzano, Thomas, Tang, Xiaohong, Thiebolt, William C., Seitz, Keith W.
• Primary Examiner(s): Patton, Amanda
• Assistant Examiner(s): EDWARDS, PHILIP CHARLES
• Application Number:
  US14/556,239
• Publication Number:
  US 20160151635A1
• Time in Patent Office: 680 Days
• Field of Search: 607/119
• US Class Current: 1/1
• CPC Class Codes: A61N 1/086 Magnetic resonance imaging [MRI] compatible leads
• CPC Class Codes: A61N 1/3718 Monitoring of or protection against external electromagnetic fields or currents
• CPC Class Codes: A61N 1/3754 Feedthroughs
• CPC Class Codes: A61N 1/3968 Constructional arrangements, e.g. casings A61N1/375 takes precedence
• CPC Class Codes: H03H 1/00 Constructional details of impedance networks whose electrical mode of operation is not specified or applicable to more than one type of network constructional details of electromechanical transducers H03H9/00
• CPC Class Codes: H03H 2001/0042 Wound, ring or feed-through type capacitor
• CPC Class Codes: H03H 2001/005 Wound, ring or feed-through type inductor
• CPC Class Codes: H03H 2001/0085 Multilayer, e.g. LTCC, HTCC, green sheets inside PCB filters H05K
• CPC Class Codes: H03H 2007/013 Notch or bandstop filters
• CPC Class Codes: H03H 7/0107 Non-linear filters
• CPC Class Codes: H03H 7/1758 Series LC in shunt or branch path H03H7/1791 takes precedence
• CPC Class Codes: H03H 7/1766 Parallel LC in series path H03H7/1783 takes precedence

Abstract

A hermetic terminal assembly for an AIMD includes a shielded three-terminal flat-through EMI energy dissipating filter and a hermetically sealed feedthrough configured to be attachable to the ferrule or AIMD housing. The flat-through filter includes a first shield plate, an active electrode plate, and a second shield plate where the shield plates are electrically coupled to a metallization which in turn is coupled either to the ferrule or AIMD housing. The feedthrough includes an alumina substrate comprised of at least 96% alumina and a via hole with a substantially closed pore and substantially pure platinum fill. The platinum fill forms a tortuous and mutually conformal knitline or interface between the alumina substrate and the platinum fill, wherein the platinum fill is electrically coupled to at least one active electrode plate in non-conductive relationship to the at least one first and second shield plates.

Claims

1. A hermetic terminal assembly for an active implantable medical device (AIMD), the hermetic terminal assembly comprising:

a) a hermetically sealed feedthrough configured to be attachable to a ferrule or an AIMD housing, the feedthrough comprising;

i) an alumina substrate comprised of at least 96 percent alumina and having a thickness extending from a first substrate side to a second substrate side;

ii) a via hole disposed through the alumina substrate from the first substrate side to the second substrate side;

iii) a substantially closed pore and substantially pure platinum fill disposed within the via hole and extending between the first substrate side and the second substrate side of the alumina substrate; and

iv) a hermetic seal between the platinum fill and the alumina substrate, wherein the platinum fill forms a tortuous and mutually conformal knitline or interface between the alumina substrate and the platinum fill; and

b) a shielded three-terminal flat-through EMI energy dissipating filter comprising;

i) at least one active electrode plate through which a circuit current is configured to pass between a first terminal and a second terminal;

ii) at least one first shield plate disposed on a first side of the at least one active electrode plate; and

iii) at least one second shield plate disposed on a second side of the at least one active electrode plate, where the at least one second shield plate is disposed opposite the at least one first shield plate;

iv) wherein the at least one first and second shield plates are both electrically coupled to a third terminal, where the third terminal is configured to be electrically coupled directly or indirectly to the ferrule or the AIMD housing;

v) wherein the platinum fill is electrically coupled directly or indirectly to the at least one active electrode plate and where the platinum fill is in non-conductive relationship to the at least one first and second shield plates, the ferrule and the AIMD housing.

2. The hermetic terminal assembly of claim 1, including an insulative washer disposed between the shielded three-terminal flat-through EMI energy dissipating filter and the alumina substrate.

3. The hermetic terminal assembly of claim 2, wherein the insulative washer comprises an adhesive insulative washer.

4. The hermetic terminal assembly of claim 1, wherein the shielded three-terminal flat-through EMI energy dissipating filter is mounted directly onto at least a portion of the alumina substrate.

5. The hermetic terminal assembly of claim 1, wherein the at least one active electrode plate is insulated from both the at least one first and second shield plates by a monolithic dielectric substrate.

6. The hermetic terminal assembly of claim 1, wherein the at least one active electrode plate comprises a plurality of active electrode plates.

7. The hermetic terminal assembly of claim 6, wherein the at least one first and second shield plates comprise a plurality of shield plates in non-conductive relationship to the plurality of active electrode plates.

8. The hermetic terminal assembly of claim 1, including a conductive pad electrically coupled to the at least one active electrode plate and forming the second terminal, wherein the conductive pad comprises a wire bond pad disposed on an exterior surface of the shielded three-terminal flat-through EMI energy dissipating filter.

9. The hermetic terminal assembly of claim 1, wherein the third terminal comprises a metallization, the metallization configured to be electrically coupled to the ferrule or the AIMD housing.

10. The hermetic terminal assembly of claim 1, wherein the hermetically sealed feedthrough comprises a second via hole disposed through the alumina substrate from the first substrate side to the second substrate side, a second substantially closed pore and substantially pure platinum fill disposed within the second via hole and extending between the first substrate side and the second substrate side of the alumina substrate, and a second hermetic seal between the second platinum fill and the alumina substrate, wherein the second platinum fill forms a second tortuous and mutually conformal knitline or interface between the alumina substrate and the second platinum fill, and including at least one ground electrode plate disposed within the alumina substrate, wherein the at least one ground electrode plate is configured to electrically couple the second platinum fill to the ferrule or the AIMD housing, and where the second platinum fill is electrically coupled to the third terminal.

11. The hermetic terminal assembly of claim 1, wherein the at least one active electrode plate at least partially comprises an inductor.

12. The hermetic terminal assembly of claim 1, including a first monolithic chip capacitor electrically coupled between the at least one active electrode plate and the at least one first or second shield plates.

13. The hermetic terminal assembly of claim 12, including a second monolithic chip capacitor electrically coupled in series with the at least one active electrode plate.

14. The hermetic terminal assembly of claim 1, wherein the at least one active electrode plate is configured to form at least a component of a capacitor, a bandstop filter, an LC trap filter, an “

L”

, a “

π

”

, a “

T”

, a “

LL”

, a “

5 element”

or an “

n”

element passive electronic low-pass filter, wherein the “

n”

element passive electronic low-pass filter is optimized for use at MRI frequencies.

15. The hermetic terminal assembly of claim 1, wherein the at least one active electrode plate is electrically connected to a passive or active electronic component within the AIMD.

16. The hermetic terminal assembly of claim 1, wherein the shielded three-terminal flat-through EMI energy dissipating filter is disposed on the second substrate side of the alumina substrate.

17. The hermetic terminal assembly of claim 1, wherein the shielded three-terminal flat-through EMI energy dissipating filter is biocompatible and disposed on a first substrate side of the alumina substrate.

18. The hermetic terminal assembly of claim 1, wherein the alumina dielectric substrate comprises at least 99 percent alumina, and wherein the platinum fill is substantially free of oxides, sintering additives and glasses, and wherein the alumina dielectric substrate is substantially free of sintering additives and glasses.

19. The hermetic terminal assembly of claim 1, wherein the hermetic seal comprises a leak rate no greater than 1×

10<sup>−

7</sup> atmospheres cubic centimeters per second of helium.

20. The hermetic terminal assembly of claim 1, wherein an inherent shrink rate during an elevated temperature sintering of the alumina substrate in a green state is greater than the platinum fill in the green state.

21. The hermetic terminal assembly of claim 1, wherein the platinum fill comprises a larger cross sectional area at either a first via end exposed to the first substrate side or a second via end exposed to the second substrate side as compared to a smaller cross sectional area of the platinum fill between the first and second via ends.

22. The hermetic terminal assembly of claim 1, including an electrically conductive cap or protrusion co-fired to the platinum fill on the first substrate side or the second substrate side.

23. The hermetic terminal assembly of claim 22, wherein the cap or protrusion comprises a biocompatible material, platinum or titanium.

24. The hermetic terminal assembly of claim 1, including an adhesion metallization disposed on an outside circumferential surface of the alumina substrate, and including a wetting metallization disposed on the adhesion metallization.

25. The hermetic terminal assembly of claim 24, including the ferrule disposed around the alumina substrate, and including a braze electrically coupled to the adhesion metallization hermetically sealing the alumina substrate to the ferrule, wherein the braze comprises gold and the ferrule comprises titanium.

26. The hermetic terminal assembly of claim 25, wherein the hermetic seal braze between the alumina substrate and the ferrule comprises a leak rate no greater than 1×

10<sup>−

7</sup> atmospheres cubic centimeters per second of helium.

27. The hermetic terminal assembly of claim 25, wherein the adhesion metallization comprises titanium, and wherein the wetting metallization comprises niobium or molybdenum.

28. The hermetic terminal assembly of claim 1, wherein the first terminal comprises a first terminal via hole with a conductive metallization electrically coupled to the at least one active electrode plate, wherein the first terminal via hole is hollow, and including a ball grid solder joint or braze between the platinum fill and the conductive metallization.

29. A hermetic terminal assembly for an active implantable medical device (AIMD), comprising:

a) a shielded three-terminal flat-through EMI energy dissipating filter, comprising;

i) at least one active electrode plate through which a circuit current is configured to pass between a first terminal and a second terminal;

ii) at least one first shield plate disposed on a first side of the at least one active electrode plate; and

iii) at least one second shield plate disposed on a second side of the at least one active electrode plate and disposed opposite the at least one first shield plate;

iv) wherein the at least one first and second shield plates are both electrically coupled to a third terminal; and

b) a hermetically sealed feedthrough configured to be attachable to a ferrule or an AIMD housing, the feedthrough comprising;

i) an alumina substrate comprised of at least 96% alumina and having a thickness extending from a first substrate side to a second substrate side;

ii) a via hole disposed through the alumina substrate from the first substrate side to the second substrate side;

iii) a first substantially closed pore and substantially pure platinum fill disposed within the via hole and extending between the first substrate side and the second substrate side of the alumina substrate, wherein the first platinum fill forms a tortuous and mutually conformal knitline or interface between the alumina substrate and the first platinum fill;

iv) a hermetic seal between the first platinum fill and the alumina substrate;

v) wherein the platinum fill is electrically coupled to the first terminal where the at least one active electrode plate is in non-conductive relationship to the at least one first and second shield plates, the ferrule and the AIMD housing;

vi) a grounded via hole disposed through the alumina substrate from the first substrate side to the second substrate side;

vii) a second substantially closed pore platinum fill disposed within the grounded via hole and extending between the first substrate side and the second substrate side of the alumina substrate; and

viii) a second hermetic seal between the second platinum fill and the alumina substrate;

ix) wherein the second platinum fill is electrically coupled to the third terminal and wherein the second platinum fill is configured to be electrically coupled directly or indirectly to the ferrule or AIMD housing.

30. The hermetic terminal assembly of claim 29, including at least one grounded electrode plate disposed in the alumina substrate electrically coupled to the second platinum fill and in non-conductive relation to the first platinum fill.

31. The hermetic terminal assembly of claim 30, including an outer metallization disposed on the alumina substrate and electrically connected to the at least one grounded electrode plate, where the outer metallization is configured to be electrically coupled to either the ferrule or the AIMD housing.

32. A hermetic terminal assembly for an active implantable medical device (AIMD), comprising:

a) a shielded three-terminal flat-through EMI energy dissipating filter comprising;

i) at least one active electrode plate through which a circuit current is configured to pass between a first terminal and a second terminal;

ii) at least one first shield plate disposed on a first side of the at least one active electrode plate; and

iii) at least one second shield plate disposed on a second side of the at least one active electrode plate and disposed opposite the at least one first shield plate;

iv) wherein the at least one first and second shield plates are both electrically coupled to a third terminal, where the third terminal is configured to be electrically coupled directly or indirectly to a ferrule or an AIMD housing;

v) wherein the at least one active electrode plate, the at least one first shield plate and the at least one second shield plate are disposed within a monolithic dielectric substrate and wherein the at least one active electrode plate is insulated from both the at least one first and second shield plates by the monolithic dielectric substrate; and

b) a hermetically sealed feedthrough configured to be attachable to the ferrule or the AIMD housing, the feedthrough comprising;

i) an alumina substrate comprised of at least 96 percent alumina and having a thickness extending from a first substrate side to a second substrate side;

ii) a via hole disposed through the alumina substrate from the first substrate side to the second substrate side;

iii) a substantially closed pore and substantially pure platinum fill disposed within the via hole and extending between the first substrate side and the second substrate side of the alumina substrate; and

iv) a hermetic seal between the platinum fill and the alumina substrate, wherein the platinum fill forms a tortuous and mutually conformal knitline or interface between the alumina substrate and the platinum fill;

v) wherein the platinum fill is electrically coupled directly or indirectly to the at least one active electrode plate where the platinum fill is in non-conductive relationship to the at least one first and second shield plates, the ferrule and the AIMD housing; and

c) a monolithic chip capacitor electrically coupled directly or indirectly between the at least one active electrode plate and the at least one first or second shield plates.