Manufacturing method for glass with film

• US 9,463,998 B2
• Filed: 12/05/2012
• Issued: 10/11/2016
• Est. Priority Date: 12/16/2011
• Status: Active Grant

• Current Assignee: Nippon Electric Glass Company Limited
• Original Assignee: Nippon Electric Glass Company Limited
• Inventors: Saitoh, Takayoshi
• Primary Examiner(s): CHEN, BRET P
• Application Number:
  US14/364,305
• Publication Number:
  US 20140377461A1
• Time in Patent Office: 1,406 Days
• US Class Current: 1/1
• CPC Class Codes: C03C 17/002 for flat glass, e.g. float glass
• CPC Class Codes: C03C 17/09 by deposition from the vapour phase
• CPC Class Codes: C03C 17/245 by deposition from the vapour phase
• CPC Class Codes: C03C 2217/21 Oxides
• CPC Class Codes: C03C 2217/25 Metals
• CPC Class Codes: C03C 2217/948 Layers comprising indium tin oxide [ITO]
• CPC Class Codes: C03C 2218/152 by cvd
• CPC Class Codes: C03C 2218/154 by sputtering
• CPC Class Codes: C23C 14/0036 Reactive sputtering
• CPC Class Codes: C23C 14/541 Heating or cooling of the substrates
• CPC Class Codes: C23C 14/562 for coating elongated substrates
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: C23C 16/545 for coating elongated substrates

Abstract

A method for manufacturing a film-coated glass film includes heating a cylindrical body made of glass or ceramic with a heater provided in an interior of the cylindrical body, heating a glass film by feeding the glass film over the heated cylindrical body, and forming a film made of an oxide, a nitride, or a metal on the glass film while the film is on and being heated by the cylindrical body.

Claims

1. A method for manufacturing a film-coated glass film, the method comprising the steps of:

heating a cylindrical body made of glass or ceramic with a heater provided in an interior of the cylindrical body;

heating a glass film by feeding the glass film over and in contact with the heated cylindrical body; and

forming a film made of an oxide, a nitride, or a metal on the glass film while the film is on and being heated by the cylindrical body.

2. The method for manufacturing a film-coated glass film according to claim 1, wherein the step of forming the film includes thermal CVD or sputtering.

3. The method for manufacturing a film-coated glass film according to claim 1, wherein the cylindrical body is made of at least one selected from the group consisting of quartz glass, crystallized glass, alumina, silica, silicon nitride, and silicon carbide.

4. The method for manufacturing a film-coated glass film according to claim 1, wherein the step of heating the glass film includes heating a portion of the cylindrical body that comes into contact with the glass film.

5. The method for manufacturing a film-coated glass film according to claim 1, wherein the step of heating the glass film includes emitting heat rays toward the cylindrical body.

6. The method for manufacturing a film-coated glass film according to claim 5, wherein the cylindrical body includes an absorbing layer disposed on an inner peripheral surface that absorbs the heat rays.

7. The method for manufacturing a film-coated glass film according to claim 1, wherein the step of forming the film includes supplying a reactive gas that thermally reacts with the glass film to form the film on the glass film, or depositing sputtered particles on the glass film to form the film on the glass film.

8. The method for manufacturing a film-coated glass film according to claim 1, wherein the cylindrical body is driven to rotate with the feeding of the glass film.

9. The method for manufacturing a film-coated glass film according to claim 1, wherein the glass film is flexible.

10. The method for manufacturing a film-coated glass film according to claim 1, wherein the heater is disposed in a cutaway of a core provided in the cylindrical body and to face an inner peripheral surface of the cylindrical body.

11. A method for manufacturing a film-coated glass film, the method comprising the steps of:

heating a cylindrical body made of glass or ceramic with a heater provided in an interior of the cylindrical body;

feeding a sheet between the cylindrical body and a glass film;

heating the glass film by feeding the glass film over and in contact with the heated cylindrical body through the sheet; and

forming a film made of an oxide, a nitride, or a metal on the glass film while the film is on and being heated by the cylindrical body;

wherein

a surface layer of the sheet next to the glass film has a hardness lower than a hardness of the glass film.

12. The method for manufacturing a film-coated glass film according to claim 11, wherein the sheet is made of metal.

13. The method for manufacturing a film-coated glass film according to claim 11, wherein a coefficient of thermal expansion of the sheet is one to ten times a coefficient of thermal expansion of the glass film.