Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
First Claim
1. A micro-electrical-mechanical system (MEMS) device comprising:
- a substrate;
one or more anchors formed on a first surface of the substrate;
a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors, wherein the piezoelectric layer is a piezoelectric bimorph;
a first electrode on a first surface of the piezoelectric layer facing the first surface of the substrate; and
a second electrode on a second surface of the piezoelectric layer opposite the first surface.
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Accused Products
Abstract
A micro-electrical-mechanical systems (MEMS) device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with a first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the first surface, such that the second electrode is in contact with a second bimorph layer of the piezoelectric layer.
36 Citations
29 Claims
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1. A micro-electrical-mechanical system (MEMS) device comprising:
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a substrate; one or more anchors formed on a first surface of the substrate; a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors, wherein the piezoelectric layer is a piezoelectric bimorph; a first electrode on a first surface of the piezoelectric layer facing the first surface of the substrate; and a second electrode on a second surface of the piezoelectric layer opposite the first surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A micro-electrical-mechanical system (MEMS) device comprising:
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a substrate; one or more anchors formed on a first surface of the substrate; a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors, wherein the piezoelectric layer is a piezoelectric bimorph; a first electrode on a first surface of the piezoelectric layer facing the first surface of the substrate; a second electrode on a second surface of the piezoelectric layer opposite the first surface; and a third electrode on the first surface of the substrate below the first electrode. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A micro-electrical-mechanical system (MEMS) device comprising:
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a substrate; one or more anchors formed on a first surface of the substrate, each of the one or more anchors comprising at least one piezoelectric anchor layer, wherein the at least one piezoelectric anchor layer is a piezoelectric bimorph; a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors; a first electrode on a first surface of the piezoelectric layer facing the first surface of the substrate; a second electrode on a second surface of the piezoelectric layer opposite the first surface; and a third electrode on the first surface of the substrate below the first electrode. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification