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Micromechanical structure having a deformable membrane and a protection against strong deformations

  • US 9,470,592 B2
  • Filed: 10/24/2012
  • Issued: 10/18/2016
  • Est. Priority Date: 10/26/2011
  • Status: Active Grant
First Claim
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1. A micromechanical structure intended to measure or detect a mechanical magnitude or a dynamic magnitude, including a deformable membrane (20) and a support substrate (10), the membrane (20) including a first part (20a) and a second part (20b) enclosed by the first part (20a), the second part (20b) having a thickness less than the thickness of the first part (20a), the membrane (20) being suspended above the support substrate (10) and thus defining a free space (30), said micromechanical structure also including a lower abutment (21) adapted to limit the deformations of the membrane (20), said lower abutment (21) being arranged above the support substrate (10) and extending in the free space (30) from said support substrate (10) towards the membrane (20), characterized in that the lower abutment (21) includes islets (101-108) which extend into the free space (30) towards the membrane (20) from a flat surface of the lower abutment (21), the islets (101-108) forming a relief structure such that in the event of contact between the islets (101-108) and the second part (20b) of the membrane (20), the contact surface between the islets (101-108) and the second part (20b) of the membrane (20) is small relative to the dimensions of the second part (20b) of the membrane (20).

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