Teeter totter accelerometer with unbalanced mass

• US 9,470,709 B2
• Filed: 01/28/2013
• Issued: 10/18/2016
• Est. Priority Date: 01/28/2013
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Zhang, Jianglong
• Primary Examiner(s): Macchiarolo, Peter
• Assistant Examiner(s): Huls, Natalie
• Application Number:
  US13/751,387
• Publication Number:
  US 20140208849A1
• Time in Patent Office: 1,359 Days
• US Class Current: 1/1
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0834 the mass constituting a pendulum having the pivot axis disposed symmetrically between the longitudinal ends, the center of mass being shifted away from the plane of the pendulum which includes the pivot axis

Abstract

A balanced teeter-totter accelerometer has a mass suspended above a substrate, the mass having an axis of rotation that is parallel to the substrate and substantially geometrically centered with respect to the shape of the mass. A physical acceleration in a direction perpendicular to the substrate causes the mass to rotate about the axis of rotation. The rotation is sensed by measuring a change in capacitance of electrodes on the substrate. The accelerometer may be calibrated using the same sensing electrodes.

Claims

1. A microelectromechanical accelerometer comprising:

a substrate having a top surface; and

a mass suspended above the substrate, the mass having a top surface facing away from the top surface of the substrate and a bottom surface facing toward the top surface of the substrate and having first and second lateral ends, the mass being configured to rotate about an axis that is substantially geometrically centered between the first and second lateral ends, the mass comprising a first section extending from the axis to the first lateral end, the first section fabricated from a first material extending from the axis to the first lateral end, the mass also comprising a second section extending from the axis to the second lateral end, the second section fabricated from a second material extending from the axis to the second lateral end, the second material being different than the first material, the first section having a greater weight than the second section.

2. The accelerometer according to claim 1, wherein the mass is suspended above the substrate using at least one flexure.

3. The accelerometer according to claim 1, further comprising at least one readout electrode on the top surface of the substrate facing the bottom surface of the mass.

4. The accelerometer according to claim 3, wherein the at least one readout electrode includes a first readout electrode facing the bottom surface of the first lateral end of the mass, a second readout electrode facing the bottom surface of the second lateral end of the mass, and a third electrode having the same electrical potential as the mass, and wherein an output acceleration is determined as a function of voltages sensed on the first, second, and third electrodes.

5. The accelerometer according to claim 1, wherein the first section and second section have apertures, and the apertures of the second section have a larger volume than the apertures of the first section.

6. The accelerometer according to claim 1, further comprising a weight affixed to the top or bottom surface of the first section.

7. The accelerometer according to claim 1, further comprising a first readout electrode on the top surface of the substrate opposing the bottom surface of the first section of the mass and a second readout electrode on the top surface of the substrate opposing the bottom surface of the second section of the mass, wherein a size, attachment position, or both of each readout electrode is configured as a function of the conductivity of the material of the opposing section.

8. The accelerometer according to claim 7, wherein the first readout electrode and the second readout electrode have different sizes.

9. A microelectromechanical accelerometer comprising:

a substrate having a top surface; and

a mass suspended above the substrate, the mass having a top surface facing away from the top surface of the substrate and a bottom surface facing toward the top surface of the substrate and having first and second lateral ends, the mass being configured to rotate about an axis that is substantially geometrically centered between the first and second lateral ends, the mass consisting of a first section between the axis and the first lateral end that is fabricated entirely from a first material and a second section between the axis and the second lateral end that is fabricated entirely from a second material different than the first material, the first section having a greater weight than the second section.

10. The accelerometer according to claim 9, wherein the mass is suspended above the substrate using at least one flexure.

11. The accelerometer according to claim 9, further comprising at least one readout electrode on the top surface of the substrate facing the bottom surface of the mass.

12. The accelerometer according to claim 11, wherein the at least one readout electrode includes a first readout electrode facing the bottom surface of the first lateral end of the mass, a second readout electrode facing the bottom surface of the second lateral end of the mass, and a third electrode having the same electrical potential as the mass, and wherein an output acceleration is determined as a function of voltages sensed on the first, second, and third electrodes.

13. The accelerometer according to claim 9, wherein the first section and second section have apertures, and the apertures of the second section have a larger volume than the apertures of the first section.

14. The accelerometer according to claim 9, further comprising a weight affixed to the top or bottom surface of the first section.

15. The accelerometer according to claim 9, further comprising a first readout electrode on the top surface of the substrate opposing the bottom surface of the first section of the mass and a second readout electrode on the top surface of the substrate opposing the bottom surface of the second section of the mass, wherein a size, attachment position, or both of each readout electrode is configured as a function of the conductivity of the material of the opposing section.

16. The accelerometer according to claim 15, wherein the first readout electrode and the second readout electrode have different sizes.

17. A microelectromechanical accelerometer comprising:

a substrate having a top surface; and

a teeter-totter mass suspended above the substrate, the teeter-totter mass having a top surface facing away from the top surface of the substrate and a bottom surface facing toward the top surface of the substrate, the teeter-totter mass configured to rotate about an axis that is substantially geometrically centered between a first lateral end on a first side of the axis and a second lateral end on a second side of the axis, wherein a first portion of the mass extending from the first lateral end on the first side of the axis is fabricated from a first material and a second portion of the mass extending from the second lateral end on the second side of the axis is fabricated from a second material, the second material being different than the first material, the first side of the teeter-totter mass having a greater weight than the second side of the teeter-totter mass.

18. The accelerometer according to claim 17, wherein the mass is suspended above the substrate using at least one flexure.

19. The accelerometer according to claim 17, further comprising at least one readout electrode on the top surface of the substrate facing the bottom surface of the mass.

20. The accelerometer according to claim 17, wherein at least one of:

the first side and second side have apertures, and the apertures of the second side have a larger volume than the apertures of the first side;

the first side includes a weight affixed to the top or bottom surface of the first side;

or

the first and second materials have different conductivities.