Thin-film bulk acoustic wave delay line

• US 9,473,106 B2
• Filed: 06/21/2012
• Issued: 10/18/2016
• Est. Priority Date: 06/21/2011
• Status: Active Grant

• Current Assignee: Hill's Pet Nutrition Incorporated (Colgate-Palmolive Company), Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Westafer, Ryan Sloan, Wathen, Adam, Hunt, William, Munir, Farasat, Davis, Kyle Spencer, Maloney, James Geoffrey
• Primary Examiner(s): TAKAOKA, DEAN O
• Application Number:
  US13/530,029
• Publication Number:
  US 20130162369A1
• Time in Patent Office: 1,580 Days
• Field of Search: 333/141, 333/149, 333187-191
• US Class Current: 1/1
• CPC Class Codes: H03H 9/30 Time-delay networks

Abstract

A thin-film bulk acoustic wave delay line device providing true-time delays and a method of fabricating same. An exemplary device can comprise several thin-film layers including thin-film transducer layers, thin-film delay layers, and stacks of additional thin-film materials providing acoustic reflectors and matching networks. The layer material selection and layer thicknesses can be controlled to improve impedance matching between transducers and the various delay line materials. For example, the transducer layers and delay layers can comprise piezoelectric and amorphous forms of the same material. The layers can be deposited on a carrier substrate using standard techniques. The device can be configured so that mechanical waves propagate solely within the thin films, providing a substrate-independent device. The device, so constructed, can be of a small size, e.g. 40 μm per side, and capable of handling high power levels, potentially up to 20 dBm, with low insertion loss of approximately 3 dB.

Claims

1. A bulk-acoustic-wave delay line device comprising:

one or more input transducer layers, including a first input transducer layer, for converting input electrical signals to mechanical waves;

one or more output transducer layers, including a first output transducer layer, for converting the mechanical waves to output electrical signals;

wherein each of the one or more input transducer layers and each of the one or more output transducer layers comprises a thin-film piezoelectric medium positioned between two electrode layers, each electrode layer comprising one or more electrodes;

one or more delay layers, including a first delay layer adjacent to the first input transducer layer and adjacent to the first output transducer layer, each delay layer comprising a thin-film delay medium; and

a substrate for carrying the one or more input transducer layers, the one or more output transducer layers, and the one or more delay layers;

wherein the thin-film piezoelectric medium comprises a first chemical composition;

wherein the first delay layer comprises an amorphous material of the first chemical composition; and

wherein the first delay layer has approximately the same acoustic impedance as the transducer layers.

2. The device of claim 1, wherein the first input transducer layer is the first output transducer layer.

3. The device of claim 1 further comprising a thin-film acoustic reflector stack between the substrate and the first input transducer layer.

4. The device of claim 1 further comprising a thin-film acoustic matching network between the substrate and the first input transducer layer.

5. The device of claim 1, wherein the substrate is configured to receive and terminate incident energy of the mechanical waves to reduce undesired reflections.

6. The device of claim 1, wherein the thin-film delay mediums and the thin-film piezoelectric mediums primarily comprise a first material that can be deposited as a thin film.

7. The device of claim 6, wherein the thin-film delay mediums are at least as thick as λ

of the first material.

8. The device of claim 6, wherein the thin-film delay mediums are a non-piezoelectric form of the first material.

9. The device of claim 1, wherein the one or more delay layers have a same acoustic impedance.

10. The device of claim 1, wherein the thickness of each of the one or more delay layers is selected to compensate for delay incurred by conveyance of the mechanical waves through output transducer layers.

11. The device of claim 1, wherein the device is no more than approximately 100 μ

m on a side, and configured to handle power levels up to approximately 20 dBm with low insertion loss.

12. The device of claim 1, configured to provide delays on the order of nanoseconds;

and

wherein the device provides for only a single path of acoustic wave propagation therethrough.

13. A thin-film bulk-acoustic-wave delay line device comprising:

an upper thin-film transducer layer for converting input electrical signals to mechanical waves;

a lower thin-film transducer layer for converting the mechanical waves to output electrical signals;

wherein each of the upper and lower thin-film transducer layers comprise;

a first electrode and a second electrode;

wherein each electrode comprises a plurality of metal layers including;

a metal layer for adhesion;

a metal layer for electrical conductance; and

a metal etch-stop layer on regions of the electrode for forming external electrical contacts; and

a piezoelectric medium of a first chemical composition and with a coupling coefficient positioned between the first and second electrodes; and

a thin-film delay layer comprising an amorphous material of the first chemical composition and positioned between the upper and lower thin-film transducer layers;

a thin-film acoustic matching network comprising a plurality of additional thin-film layers and positioned between a substrate and the lower thin-film transducer layer; and

the substrate for carrying the thin-film transducer layers, the thin-film delay layer, and the thin-film acoustic matching network;

wherein thin-film delay layer has approximately the same acoustic impedance as each of the upper and lower thin-film transducer layers.

14. A bulk-acoustic-wave delay line device comprising:

an input transducer layer for converting input electrical signals to mechanical waves;

an output transducer layer for converting the mechanical waves to output electrical signals;

wherein the input transducer layer and the output transducer layer each comprise a thin-film piezoelectric medium comprising a first chemical composition positioned between two electrode layers, each electrode layer comprising an electrode; and

a delay layer comprising an amorphous material of the first chemical composition, the delay layer adjacent the input transducer layer and the output transducer layer, the delay layer comprising a thin-film delay medium;

wherein the delay layer has approximately the same acoustic impedance as the transducer layer.

15. The device of claim 14 further comprising a thin-film acoustic reflector stack.

16. The device of claim 14 further comprising a thin-film acoustic matching network.

17. The device of claim 14, wherein the thickness of the delay layer is selected to compensate for delay incurred by conveyance of the mechanical waves through the output transducer layer.

18. The device of claim 14, wherein the device is no more than approximately 100 μ

m on a side, and configured to handle power levels up to approximately 20 dBm with low insertion loss.