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Probe card

  • US 9,476,913 B2
  • Filed: 07/10/2014
  • Issued: 10/25/2016
  • Est. Priority Date: 07/19/2013
  • Status: Active Grant
First Claim
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1. A probe card, comprising:

  • a wiring substrate including an insulating layer and a wiring layer formed on the insulating layer;

    an opening portion penetrating the insulating layer and the wiring layer of the wiring substrate in a thickness direction, the opening portion having a quadrangle shape in a plan view, wherein four side faces of the opening portion are formed in a step shape, and have step faces;

    a first connection pad formed on the step faces of the side faces of the opening portion of the wiring substrate;

    a second connection pad formed on the step faces of the side faces of the opening portion of the wiring substrate, wherein the first connection pad and the second connection pad are arranged, so as to oppose, in facing step faces in the four side faces of the opening portion, wherein the first connection pad and the second connection pad are exposed from an inner face of the opening portion, the first connection pad and the second connection pad each connected to one of the wiring layer;

    a resin portion formed in the opening portion of the wiring substrate, the resin portion burying the first connection pad and the second connection pad;

    a first bonding wire buried in the resin portion, the first bonding wire in which one end is connected to the first connection pad and the other end constitutes a protruding portion protruding from a lower face of the resin portion, the lower face which is located to a reverse face side to a face on which the first and second connection pads are arranged;

    a first contact terminal formed from the protruding portion of the first bonding wire, the first contact terminal protruding downward from the lower face of the resin portion, in a state that a whole of a side face of the first contact terminal is exposed from the resin portion, wherein the first contact terminal and the first bonding wire are formed of one bonding wire which is made of the same metal;

    a second bonding wire buried in the resin portion, the second wire in which one end is connected to the second connection pad and the other end constitutes a protruding portion protruding from the lower face of the resin portion; and

    a second contact terminal formed from the protruding portion of the second bonding wire, the second contact terminal protruding downward from the lower face of the resin portion, in a state that a whole of a side face of the second contact terminal is exposed from the resin portion, wherein the second contact terminal and the second bonding wire are formed of one bonding wire which is made of the same metal,wherein each diameter of the first contact terminal and the second contact terminal is equal to each diameter of the first wire and the second wire buried in the resin portion, andthe first bonding wire and the second bonding wire extend on one line in a plan view, and the first contact terminal and the second contact terminal are arranged side by side on the one line, andthe first bonding wire having the first contact terminal in a tip side is arranged to be opposite to the second bonding wire having the second contact terminal in a tip side, such that a distance between the first bonding wire and the second bonding wire narrows gradually as a position becomes the tip side, andthe first contact terminal and the second contact terminal contact one electrode pad of a test object in a pair.

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