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Semiconductor device and method of stacking semiconductor die on a fan-out WLCSP

  • US 9,478,485 B2
  • Filed: 04/24/2014
  • Issued: 10/25/2016
  • Est. Priority Date: 06/28/2013
  • Status: Active Grant
First Claim
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1. A method of making a semiconductor device, comprising:

  • providing a first semiconductor die including a plurality of contact pads formed over a central region of the first semiconductor die;

    forming a first conductive layer over the first semiconductor die and extending from the contact pads to a peripheral region of the first semiconductor die;

    forming a plurality of first interconnect structures over the first conductive layer in the peripheral region of the first semiconductor die;

    forming a first protective coating over the first semiconductor die and around the first interconnect structures;

    removing a portion of the first semiconductor die opposite the first interconnect structures after forming the first protective coating;

    removing the first protective coating after removing the portion of the first semiconductor die;

    providing a second semiconductor die including a plurality of bumps formed on an active surface of the second semiconductor die;

    disposing the first semiconductor die over the second semiconductor die with the bumps oriented away from the first semiconductor die and with the first interconnect structures disposed around the second semiconductor die;

    depositing an encapsulant around the first semiconductor die and second semiconductor die; and

    forming a second conductive layer contacting the bumps and first interconnect structures.

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