Measuring setup and hold times using a virtual delay

• US 9,479,179 B2
• Filed: 04/28/2014
• Issued: 10/25/2016
• Est. Priority Date: 04/28/2014
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: GlobalFoundries, Inc.
• Inventors: Nguyen, Andy T., Jain, Navneet
• Primary Examiner(s): Assouad, Patrick
• Assistant Examiner(s): PRETLOW, DEMETRIUS R
• Application Number:
  US14/263,329
• Publication Number:
  US 20150309113A1
• Time in Patent Office: 911 Days
• Field of Search: 32476201-76203, 324/750.3, 714/731, 713/400, 713/401, 713/500, 713/501, 716104-116
• US Class Current: 1/1
• CPC Class Codes: G01R 31/31727 Clock circuits aspects, e.g. test clock circuit details, timing aspects for signal generation, circuits for testing clocks G01R31/31725 takes precedence; concerning scan test G01R31/318552, for tester hardware G01R31/31922
• CPC Class Codes: H03K 23/50 using bi-stable regenerative trigger circuits H03K23/42 - H03K23/48 take precedence
• CPC Class Codes: H03K 5/22 Circuits having more than one input and one output for comparing pulses or pulse trains with each other according to input signal characteristics, e.g. slope, integral indicating phase difference of two cyclic pulse trains G01R25/00

Abstract

Methodologies and an apparatus for measuring setup and hold times of fabricated semiconductor devices are provided. Embodiments include: providing a first digital frequency divider having an input and an output, the input of the first digital frequency divider receiving a first signal indicating an oscillating signal with a first delay; providing a second digital frequency divider having an input and output, the input of the second digital frequency divider receiving a second signal indicating the oscillating signal with a second delay; and providing a flip-flop having an input and an output, wherein the input of the flip-flop is coupled to the output of the second digital frequency divider and a data signal and clock signal for measuring a set-up time or hold time of a device under test are generated.

Claims

1. A method comprising:

providing a first digital frequency divider having an input and an output, the input of the first digital frequency divider receiving a first signal indicating an oscillating signal with a first delay;

providing a second digital frequency divider having an input and output, the input of the second digital frequency divider receiving a second signal indicating the oscillating signal with a second delay; and

providing a flip-flop having an input and an output, wherein the input of the flip-flop is coupled to the output of the second digital frequency divider and a data signal and clock signal for measuring a set-up time, hold time, or a combination thereof of a device under test are generated based on a signal of the output of the first digital frequency divider and a signal of the output of the flip-flop, respectively.

2. The method according to claim 1, comprising:

providing a first logical gate having first and second inputs and an output, wherein the first input of the first logical gate is coupled to the output of the first logical gate and to one or more first loading capacitors and wherein the first signal is generated based on a signal output on the output of the first logical gate; and

providing a second logical gate having first and second inputs and an output, wherein the first input of the second logical gate is coupled to the output of the second logical gate and to one or more second loading capacitors, and wherein the second signal is generated based on a signal output on the output of the second logical gate.

3. The method according to claim 2, comprising:

selectively switching to select one or more capacitors for the one or more first loading capacitors, one or more second loading capacitors, or a combination thereof based on a measurement resolution for measuring set-up time, hold time, or a combination thereof for the device under test.

4. The method according to claim 1, wherein the first and second digital frequency dividers and the flip-flop are provided on a fabricated circuit device, the method further comprising receiving the first and second signals on one or more inputs to the fabricated circuit device.

5. The method according to claim 1, comprising:

providing one or more multiplexers configured to selectively couple the respective inputs of the first and second digital frequency dividers to configure the data signal and clock signal for measuring a set-up time for a first state, a set-up time for a second state, a hold time for the first state, or a hold time for the second state of the device under test.

6. The method according to claim 1, further comprising:

providing a logical gate circuit having a first input coupled to the output of the flip-flop, a second input, and an output, wherein the second input of the logical gate circuit receives a signal based on the second signal and wherein the clock signal is output on the output of the logical gate circuit.

7. The method according to claim 6, wherein the device under test further comprises an output, the logical gate circuit further comprises a third input coupled to the output of the device under test, and the logical gate circuit is configured to compare a signal on the output of the device under test with a reference value and to generate a signal indicating a pass or fail state based on the comparison.

8. The method according to claim 7, comprising:

determining a portion of the data signal and a portion of the clock signal based on an edge of the signal indicating a pass or fail state; and

determining the set-up time, hold time, or a combination thereof for the device under test based on the portion of the data signal and the portion of the clock signal.

9. The method according to claim 7, wherein the logical gate circuit is configured to generate a signal indicating a difference between the first and second delays, wherein the method further comprises:

determining the set-up time, hold time, or a combination thereof for the device under test based on the signal indicating a difference between the first and second delays.

15. The apparatus according to claim 9, wherein the first and second frequency dividers and the flip flop are a built-in-self-test circuit of the device under test.

10. An apparatus comprising:

a first digital frequency divider having an input and an output, the input of the first digital frequency divider receiving a first signal indicating an oscillating signal with a first delay;

a second digital frequency divider having an input and output, the input of the second digital frequency divider receiving a second signal indicating the oscillating signal with a second delay; and

a flip-flop having an input and an output, wherein the input of the flip-flop is coupled to the output of the second digital frequency divider and a data signal and clock signal for measuring a set-up time, hold time, or a combination thereof of a device under test are generated based on a signal of the output of the first digital frequency divider and a signal of the output of the flip-flop, respectively.

11. The apparatus according to claim 10, further comprising:

a first logical gate having first and second inputs and an output, wherein the first input of the first logical gate is coupled to the output of the first logical gate and to one or more first loading capacitors and wherein the first signal is generated based on a signal output on the output of the first logical gate; and

a second logical gate having first and second inputs and an output, wherein the first input of the second logical gate is coupled to the output of the second logical gate and to one or more second loading capacitors and wherein the second signal is generated based on a signal output on the output of the second logical gate.

12. The apparatus according to claim 10, further comprising:

one or more multiplexers configured to selectively couple the respective inputs of the first and second digital frequency dividers to configure the data signal and clock signal for measuring a set-up time for a first state, a set-up time for a second state, a hold time for the first state, or a hold time for the second state of the device under test.

13. The apparatus according to claim 10, further comprising:

a logical gate circuit having a first input coupled to the output of the flip-flop, a second input, and an output, wherein the second input of the logical gate circuit receives a signal based on the second signal and wherein the clock signal is further based on the output of the logical gate circuit.

14. The apparatus according to claim 13, wherein the device under test further comprises an output, the logical gate circuit further comprises a third input coupled to the output of the device under test, and the logical gate circuit is configured to compare a signal on the output of the device under test with a reference value and to generate a signal indicating a pass or fail state based on the comparison.

16. An apparatus comprising:

a device under test having a data input, clock input, and output; and

a test circuit having an input coupled to the output of the device under test and first and second outputs coupled the data and clock inputs, respectively, the test circuit comprising;

a first digital frequency divider having an input and an output, the input of the first digital frequency divider receiving a first signal indicating an oscillating signal with a first delay;

a second digital frequency divider having an input and output, the input of the second digital frequency divider receiving a second signal indicating the oscillating signal with a second delay; and

a flip-flop having an input and an output, wherein the input of the flip-flop is coupled to the output of the second digital frequency divider, wherein a data signal and clock signal for measuring a set-up time, hold time, or a combination thereof of the device under test are generated on the first and second outputs of the test circuit and the data and clock signals are based on a signal of the output of the first digital frequency divider and a signal of the output of the flip-flop, respectively.

17. The apparatus according to claim 16, wherein the test circuit further comprises one or more multiplexers configured to selectively couple the respective inputs of the first and second digital frequency dividers to configure the data signal and clock signal for measuring a set-up time for a first state, a set-up time for a second state, a hold time for the first state, or a hold time for the second state of a device under test.

18. The apparatus according to claim 17, wherein the test circuit further comprises a logical gate circuit having a first input coupled to the output of the flip-flop, a second input, and an output coupled to the clock input, wherein the second input of the logical gate circuit receives a signal based on the second signal.

19. The apparatus according to claim 16, wherein the test circuit further comprises an oscillating signal circuit comprising:

a first logical gate having first and second inputs and an output, wherein the first input of the first logical gate is coupled to the output of the first logical gate and to a first loading capacitor and wherein the oscillating signal with the first delay is generated based on a signal output on the output of the first logical gate; and

a second logical gate having first and second inputs and an output, wherein the first input of the second logical gate is coupled to the output of the second logical gate and to a second loading capacitor and wherein the oscillating signal with the second delay is generated based on a signal output on the output of the second logical gate.

20. The apparatus according to claim 18, wherein the test circuit does not include a finite state machine.