Multi-mode microphones
First Claim
1. A sensor system, comprising:
- a deformable structure, wherein the deformable structure is subject to deformation in response to external phenomenon, wherein the deformable structure comprises;
at least one layer of piezoelectric material; and
at least one actuator port disposed on the at least one layer of piezoelectric material, wherein the at least one actuator port is configured to actuate the at least one layer of piezoelectric material via application of an electrical signal to the at least one layer of piezoelectric material, wherein the at least one layer of piezoelectric material is configured to generate a force responsive to the electrical signal;
at least one sensing port, wherein the at least one sensing port is in contact with a region of the deformable structure, and wherein the at least one sensing port is configured to;
sense a deformation of the region of the deformable structure; and
generate a signal in response to the deformation; and
a sensing element, wherein the sensing element is configured to detect deformation of the deformable structure via the signal generated by the at least one sensing port.
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Accused Products
Abstract
In some embodiments, a sensor system may include a deformable structure and a sensing element. The deformable structure may include at least one layer of piezoelectric material and at least one actuator port disposed on the at least one layer of piezoelectric material. The deformable structure may deform in response to external phenomenon. The at least one actuator port may be configured to actuate the at least one layer of piezoelectric material via application of an electrical signal to the at least one layer of piezoelectric material. The at least one layer of piezoelectric material may be configured to apply a force to the deformable structure when actuated. The sensing element may be configured to sense deformation of the deformable structure capacitively, optically, or via a sensing port according to embodiments.
27 Citations
29 Claims
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1. A sensor system, comprising:
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a deformable structure, wherein the deformable structure is subject to deformation in response to external phenomenon, wherein the deformable structure comprises; at least one layer of piezoelectric material; and at least one actuator port disposed on the at least one layer of piezoelectric material, wherein the at least one actuator port is configured to actuate the at least one layer of piezoelectric material via application of an electrical signal to the at least one layer of piezoelectric material, wherein the at least one layer of piezoelectric material is configured to generate a force responsive to the electrical signal; at least one sensing port, wherein the at least one sensing port is in contact with a region of the deformable structure, and wherein the at least one sensing port is configured to; sense a deformation of the region of the deformable structure; and generate a signal in response to the deformation; and a sensing element, wherein the sensing element is configured to detect deformation of the deformable structure via the signal generated by the at least one sensing port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A multi-mode microphone system, comprising:
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a substrate; a multi-mode microphone coupled to the substrate, wherein the multi-mode microphone comprises; a deformable structure, comprising; at least one layer of piezoelectric material; and at least one actuator port disposed on the at least one layer of piezoelectric material, wherein the at least one actuator port is configured to actuate the at least one layer of piezoelectric material via application of an electrical signal to the at least one layer of piezoelectric material, wherein the at least one layer of piezoelectric material is configured to generate a force responsive to the electrical signal; and at least one sensing port, wherein the at least one sensing port is in contact with a region of the deformable structure, and wherein the at least one sensing port is configured to; sense a deformation of the region of the deformable structure; and generate a signal in response to the deformation; and a processing element, electrically coupled to the substrate and multi-mode microphone, wherein the processing element is configured to; sense deformation of the deformable structure via the signal generated by the at least one sensing port; and transmit the electrical signal to the at least one actuator port. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28)
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29. A method comprising:
a processing element performing, sensing deformation of a deformable structure via a signal generated by at least one sensing port, wherein the at least one sensing port is in contact with a region of the deformable structure, wherein the at least one sensing port is configured to generate a signal in response to the deformation, wherein the deformable structure comprises at least one layer of piezoelectric material and at least one actuator port disposed on the at least one layer of piezoelectric material, wherein the at least one actuator port is configured to actuate the at least one layer of piezoelectric material via application of an electrical signal to the at least one layer of piezoelectric material, wherein the at least one layer of piezoelectric material is configured to generate a force responsive to the electrical signal; and transmit the electrical signal to the at least one actuator port.
Specification