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Apparatus for process automation using a pin and bushing array

  • US 9,480,987 B2
  • Filed: 10/08/2013
  • Issued: 11/01/2016
  • Est. Priority Date: 11/07/2005
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a plurality of functional modules, each functiona mod u e comprising a tool interface, the tool interface capable of moving independently and along a first axis and a second axis, each tool interface to interface with at least one tool to operate on work samples;

    a conveyer to transfer work samples from at least one of the plurality of functional modules to another functional module or another module or instrument, the conveyor capable of movement along a third axis perpendicular to the first and second axes; and

    a controller for coordinating the operation of the plurality of functional modules and the conveyer;

    wherein, the plurality of functional modules are substantially identical to each other in terms of the tool interface and ability to move in the first and second axes.

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