Adjustable non-dissipative voltage boosting snubber network

• US 9,483,066 B2
• Filed: 11/18/2015
• Issued: 11/01/2016
• Est. Priority Date: 11/01/2012
• Status: Active Grant

• Current Assignee: AES Global Holdings Pte Ltd. (Advanced Energy Industries, Inc. (China))
• Original Assignee: Advanced Energy Industries Incorporated
• Inventors: Finley, Kenneth W.
• Primary Examiner(s): King, Monica C
• Application Number:
  US14/945,324
• Publication Number:
  US 20160139617A1
• Time in Patent Office: 349 Days
• US Class Current: 1/1
• CPC Class Codes: G05F 1/46 wherein the variable actually regulated by the final control device is dc G05F1/625 takes precedence
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01J 37/3444 Associated circuits
• CPC Class Codes: H02H 3/087 for dc applications
• CPC Class Codes: H02H 9/042 comprising means to limit the absorbed power or indicate damaged over-voltage protection device
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/48 using an arc H05H1/26 takes precedence
• CPC Class Codes: H05H 2242/26 Matching networks

Abstract

This disclosure describes a non-dissipative snubber circuit configured to boost a voltage applied to a load after the load'"'"'s impedance rises rapidly. The voltage boost can thereby cause more rapid current ramping after a decrease in power delivery to the load which results from the load impedance rise. In particular, the snubber can comprise a combination of a unidirectional switch, a voltage multiplier, and a current limiter. In some cases, these components can be a diode, voltage doubler, and an inductor, respectively.

Claims

1. A snubber circuit comprising:

a voltage multiplier coupled between a first power rail and a second power rail, the voltage multiplier storing energy from the first power rail and consequently boosting a voltage between the first and second power rail, and then discharging at least some of the energy and consequently reducing the voltage between the first and second power rail;

a first unidirectional switch coupled between the first power rail and the voltage multiplier and allowing current to pass from the first power rail to the voltage multiplier, but blocking current attempting to pass from the voltage multiplier to the first power rail through the first unidirectional switch;

a first current limiter coupled in parallel to the first unidirectional switch between the first power rail and the voltage multiplier, the first current limiter providing a low-resistance current path from the voltage multiplier to the first power rail and limiting a rate of change of current that the voltage multiplier discharges to the first power rail; and

a second unidirectional switch coupled in series with the first current limiter and allowing current to pass from the voltage multiplier to the first power rail, but blocking current attempting to pass into the voltage multiplier through the first current limiter.

2. The snubber circuit of claim 1, wherein the snubber circuit is coupled between a power supply and a load having an impedance.

3. The snubber circuit of claim 2, wherein the voltage multiplier absorbs and stores energy from the power supply when the impedance of the load substantially increases.

4. The snubber circuit of claim 3, wherein a switching circuit is coupled between the snubber and the load and receives DC power from the power supply and provides pulsed DC power to the load.

5. The snubber circuit of claim 3, wherein the boosting of the voltage between the first and second power rails increases a current ramp rate of power reaching the load.

6. The snubber circuit of claim 1, wherein the snubber is a non-dissipative snubber.

7. The snubber circuit of claim 1, wherein the snubber is part of a switching circuit that converts DC power to pulsed DC power.

8. The snubber circuit of claim 1, wherein the snubber is part of a DC power supply provides DC power to vulnerable circuitry.

9. The snubber circuit of claim 8, wherein the vulnerable circuitry is arranged between the snubber and a load.

10. The snubber circuit of claim 1, further comprising a voltage multiplier modifier that controls an amount of the boosting of the voltage between the first and second power rails.

11. The snubber circuit of claim 1, further comprising a second current limiter coupled in series with the first unidirectional switch.

12. The snubber circuit of claim 1, further comprising a switch coupled between the voltage multiplier and the first current limiter.

13. The snubber circuit of claim 12, wherein the switch opens when a current in the first current limiter reaches a threshold.

14. A method of operating a snubber circuit, the method comprising:

storing energy from a first power rail in a voltage multiplier, the voltage multiplier coupled between the first power rail and a second power rail;

boosting a voltage between the first and second power rails as a consequence of the storing;

discharging at least some of the energy stored in the voltage multiplier to the first power rail, thereby reducing the voltage between the first and second power rails;

enabling current to pass from the first power rail to the voltage multiplier via a first unidirectional switch coupled between the first power rail and the voltage multiplier;

blocking current from passing from the voltage multiplier to the first power rail via the first unidirectional switch;

providing a low-resistance current path from the voltage multiplier to the first power rail through a first current limiter in parallel to the first unidirectional switch;

limiting a rate of change of current that the voltage multiplier discharges to the first power rail through the first current limiter; and

enabling current to pass from the voltage multiplier to the first power rail via the first current limiter and a second unidirectional switch, and blocking current from passing from the first power rail to the voltage multiplier via the first current limiter and the second unidirectional switch.

15. The method of claim 14, further comprising receiving power from a DC power supply at the snubber circuit, and controlling a voltage provided to a switching circuit coupled between the snubber and the plasma load, the switching circuit receiving DC power from the power supply and providing AC power to the plasma load.

16. The method of claim 15, further comprising increasing the energy stored in the voltage multiplier when an impedance of the plasma load increases.

17. The method of claim 16, further comprising increasing a current ramp rate of power reaching the plasma load as a consequence of increasing the energy stored in the voltage multiplier.

18. The method of claim 14, further comprising controlling the boosting via a voltage multiplier modifier of the snubber circuit.

19. The method of claim 14, further comprising opening a switch between the voltage multiplier and the first current limiter when a current through the first current limiter reaches or exceeds a threshold.