Acoustic resonator having temperature compensation
First Claim
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1. An acoustic resonator structure, comprising:
- a substrate having an air cavity;
an acoustic stack disposed over the substrate and comprising a piezoelectric layer disposed between a first electrode and a second electrode;
an acoustic reflector disposed on the substrate between the air cavity and the acoustic stack, the acoustic reflector comprising a single pair of acoustic impedance layers configured to reflect acoustic waves produced by vibration of the acoustic stack, wherein at least one of the acoustic impedance layers comprises a temperature compensating material; and
a planarization layer disposed beneath the piezoelectric layer and adjacent to the first electrode, wherein a first layer among the single pair of acoustic impedance layers is formed adjacent to the substrate and a second layer among the single pair of acoustic impedance layers comprises the temperature compensating material, wherein the first layer is etched in a region over the air cavity such that a portion of the second layer is exposed to the air cavity.
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Abstract
An acoustic resonator structure comprises a substrate having an air cavity, an acoustic stack disposed over the substrate and comprising a piezoelectric material disposed between a first electrode and a second electrode, and an acoustic reflector disposed over the substrate and comprising a single pair of acoustic impedance layers configured to reflect acoustic waves produced by vibration of the acoustic stack, wherein at least one of the acoustic impedance layers comprises a temperature compensating material.
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Citations
27 Claims
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1. An acoustic resonator structure, comprising:
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a substrate having an air cavity; an acoustic stack disposed over the substrate and comprising a piezoelectric layer disposed between a first electrode and a second electrode; an acoustic reflector disposed on the substrate between the air cavity and the acoustic stack, the acoustic reflector comprising a single pair of acoustic impedance layers configured to reflect acoustic waves produced by vibration of the acoustic stack, wherein at least one of the acoustic impedance layers comprises a temperature compensating material; and a planarization layer disposed beneath the piezoelectric layer and adjacent to the first electrode, wherein a first layer among the single pair of acoustic impedance layers is formed adjacent to the substrate and a second layer among the single pair of acoustic impedance layers comprises the temperature compensating material, wherein the first layer is etched in a region over the air cavity such that a portion of the second layer is exposed to the air cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An acoustic resonator structure, comprising:
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a substrate having an air cavity; an acoustic stack disposed over the substrate and comprising a piezoelectric layer disposed between a first electrode and a second electrode;
an acoustic reflector disposed over the substrate and comprising a single acoustic impedance layer comprising a temperature compensating material and configured to reflect acoustic waves produced by vibration of the acoustic stack, wherein the acoustic stack is disposed between the substrate and the single acoustic impedance layer; anda planarization layer disposed beneath the piezoelectric layer and adjacent to the first electrode. - View Dependent Claims (14, 15, 16)
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17. An acoustic resonator structure, comprising:
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a substrate having an air cavity; an acoustic stack disposed over the substrate and comprising a piezoelectric material disposed between a first electrode and a second electrode; and an acoustic reflector disposed over the substrate and between the air cavity and the acoustic stack, the acoustic reflector comprising a single pair of acoustic impedance layers configured to reflect acoustic waves produced by vibration of the acoustic stack, wherein a first layer among the single pair of acoustic impedance layers is formed adjacent to the substrate and a second layer among the single pair of acoustic impedance layers comprises the temperature compensating material, wherein the first layer is etched in a region over the air cavity such that a portion of the second layer is exposed to the air cavity. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification