Structure for circuit board used in electronic devices and method for manufacturing the same
First Claim
1. A structure, comprising:
- an inorganic insulating layer that includes first inorganic particles including amorphous silicon oxide and second inorganic insulating particles including amorphous silicon oxide and has an elastic modulus which is 45 GPa or less,the first inorganic insulating particles being connected to each other,the second inorganic insulating particles being connected to each other via the first inorganic insulating particles and having a larger particle diameter than a particle diameter of the first inorganic insulating particles,wherein an elastic modulus of the first inorganic insulating particles is smaller than an elastic modulus of the second inorganic insulating particles.
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Accused Products
Abstract
A structure for which the electrical reliability is improved is provided. A structure in accordance with one embodiment includes an inorganic insulating layer including amorphous silicon oxide and having an elastic modulus which is 45 GPa or less. A method for manufacturing a structure in accordance with one embodiment includes applying an inorganic insulating sol including inorganic insulating particles composed of amorphous silicon oxide, and forming an inorganic insulating layer including amorphous silicon oxide and having an elastic modulus which is 45 GPa or less by heating the inorganic insulating particles at a temperature lower than a crystallization onset temperature of silicon oxide to each other.
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Citations
12 Claims
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1. A structure, comprising:
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an inorganic insulating layer that includes first inorganic particles including amorphous silicon oxide and second inorganic insulating particles including amorphous silicon oxide and has an elastic modulus which is 45 GPa or less, the first inorganic insulating particles being connected to each other, the second inorganic insulating particles being connected to each other via the first inorganic insulating particles and having a larger particle diameter than a particle diameter of the first inorganic insulating particles, wherein an elastic modulus of the first inorganic insulating particles is smaller than an elastic modulus of the second inorganic insulating particles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A structure, comprising:
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an inorganic insulating layer that includes first inorganic particles including amorphous silicon oxide and second inorganic insulating particles including amorphous silicon oxide and has an elastic modulus which is 45 GPa or less, the first inorganic insulating particles being connected to each other, the second inorganic insulating particles being connected to each other via the first inorganic insulating particles and having a larger particle diameter than a particle diameter of the first inorganic insulating particles, wherein a proportion of three-membered ring structure to multi-membered ring structure of the first inorganic insulating particles is smaller than a proportion of three-membered ring structure to multi-membered ring structure of the second inorganic insulating particles.
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Specification