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Techniques for scanned illumination

  • US 9,488,823 B2
  • Filed: 06/03/2013
  • Issued: 11/08/2016
  • Est. Priority Date: 06/07/2012
  • Status: Active Grant
First Claim
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1. A method for operating an imaging system, the method comprising:

  • collecting a two-dimensional image of a portion of a substrate on a positioning stage via a digital camera in the imaging system by moving the positioning stage in a first path of travel under an objective lens component of the imaging system that is normal to the optical axis of the objective lens component, wherein the image spans multiple rows of pixels of a sensor element in the camera;

    while the camera is collecting the image of the portion of the substrate, performing steps comprising;

    scanning a line of light across the portion of the substrate by changing an angle of a scan mirror so that the image of the portion of the substrate that is acquired by the objective lens component is kept still with respect to the digital camera while the substrate is moving in a continuous motion, thereby exposing first one or more rows of pixels spanned by the image while keeping in the dark second one or more rows of pixels spanned by the image; and

    reading out the first one or more rows of pixels while continuing to scan the line of light across the portion of the substrate thereby exposing the second one or more rows of pixels.

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