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Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer

  • US 9,490,418 B2
  • Filed: 11/27/2013
  • Issued: 11/08/2016
  • Est. Priority Date: 03/29/2011
  • Status: Active Grant
First Claim
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1. An acoustic resonator, comprising:

  • an acoustic reflector disposed on a substrate over a cavity formed in the substrate, the acoustic reflector comprising a layer of low acoustic impedance material stacked on a layer of high acoustic impedance material;

    a bottom electrode disposed on the layer of low acoustic impedance material of the acoustic reflector;

    a piezoelectric layer disposed on the bottom electrode;

    a top electrode disposed on the piezoelectric layer; and

    a collar formed outside a main membrane region defined by an overlap between the top electrode, the piezoelectric layer and the bottom electrode, the collar having an inner edge substantially aligned with a boundary of or overlapping the main membrane region,wherein the layer of the low acoustic impedance material comprises a temperature compensating material having a positive temperature coefficient for offsetting at least a portion of a negative temperature coefficient of the piezoelectric layer, the bottom electrode and the top electrode.

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