Acoustic resonator comprising collar and frame
First Claim
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1. An acoustic resonator structure, comprising:
- an acoustic reflector disposed in or over a substrate;
a first electrode disposed over the substrate;
a piezoelectric layer disposed over the first electrode;
a second electrode disposed over the piezoelectric layer;
a frame disposed within a main membrane region, the membrane defined by an overlap between the first electrode, the piezoelectric layer, the second electrode, and the acoustic reflector, and the frame having an outer edge substantially aligned with a boundary of the main membrane region, wherein the frame is disposed at a bottom portion of the second electrode; and
a collar, which is separate from the frame, disposed adjacent to the main membrane region, and the collar having an inner edge substantially aligned with the boundary of or overlapping the main membrane region.
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Abstract
An acoustic resonator structure comprises a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, a frame disposed within a main membrane region defined by an overlap between the first electrode, the piezoelectric layer, and the second electrode, and having an outer edge substantially aligned with a boundary of the main membrane region, and a collar formed separate from the frame, disposed outside the main membrane region, and having an inner edge substantially aligned with the boundary of or overlapping the main membrane region.
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Citations
25 Claims
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1. An acoustic resonator structure, comprising:
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an acoustic reflector disposed in or over a substrate; a first electrode disposed over the substrate; a piezoelectric layer disposed over the first electrode; a second electrode disposed over the piezoelectric layer; a frame disposed within a main membrane region, the membrane defined by an overlap between the first electrode, the piezoelectric layer, the second electrode, and the acoustic reflector, and the frame having an outer edge substantially aligned with a boundary of the main membrane region, wherein the frame is disposed at a bottom portion of the second electrode; and a collar, which is separate from the frame, disposed adjacent to the main membrane region, and the collar having an inner edge substantially aligned with the boundary of or overlapping the main membrane region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An acoustic resonator structure, comprising:
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an acoustic stack comprising a piezoelectric layer sandwiched between first and second electrode layers and having a main membrane region defined by an overlap between the first electrode, the piezoelectric layer, the second electrode, and a substrate having an air cavity, wherein the first electrode layer is disposed over the substrate having the air cavity; a frame disposed within the main membrane region, and between the piezoelectric layer and the second electrode layer, the frame having an outer edge substantially aligned with a boundary of the main membrane region; and a collar disposed adjacent to the main membrane region, and between the substrate and the first electrode, the collar having an inner edge substantially aligned with the boundary of or overlapping the main membrane region, wherein the frame and the collar are located at different layers of the acoustic stack.
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14. An acoustic resonator structure, comprising:
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an acoustic reflector disposed in or over a substrate a first electrode disposed over a substrate; a piezoelectric layer disposed over the first electrode; a second electrode disposed over the piezoelectric layer; a frame disposed within a main membrane region defined by an overlap between the first electrode, the piezoelectric layer, the second electrode, and the acoustic reflector, the frame having an outer edge substantially aligned with a boundary of the main membrane region; and a collar, which is separate from the frame, disposed adjacent to the main membrane region, and the collar having an inner edge substantially aligned with the boundary of or overlapping the main membrane region, the collar being disposed between the first electrode and the piezoelectric layer, or between the first electrode and the substrate. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. An acoustic resonator structure, comprising:
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a first electrode disposed over a substrate; a piezoelectric layer disposed over the first electrode; a second electrode disposed over the piezoelectric layer; a frame disposed within a main membrane region defined by an overlap between the first electrode, the piezoelectric layer, and the second electrode, and the frame having an outer edge substantially aligned with a boundary of the main membrane region; a collar, which is separate from the frame, disposed adjacent to the main membrane region, and the collar having an inner edge substantially aligned with the boundary of or overlapping the main membrane region; and a planarization layer disposed over the piezoelectric layer adjacent to the second electrode, wherein the collar is disposed over the planarization layer and the second electrode.
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Specification