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System and method for simultaneous detection of secondary electrons and light in a charged particle beam system

  • US 9,494,516 B2
  • Filed: 05/26/2015
  • Issued: 11/15/2016
  • Est. Priority Date: 01/30/2011
  • Status: Active Grant
First Claim
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1. An image processing method for stored image data comprising:

  • directing a charged particle beam in a pattern across a region of a sample;

    detecting charged particles emitted from the sample due to the impact of the charged particle beam to form a charged particle imaging signal;

    forming a charged particle beam image using the charged particle imaging signal;

    detecting light emitted from the region of the sample, the amplitude of the detected light signal over time forming a curve;

    convolving the curve with a smoothing function to generate smoothed light signal data;

    combining the smoothed light signal data with a derivative function to generate derivative light signal data;

    determining values corresponding to local minima of the derivative light signal data and the position of the charged particle beam corresponding to the local minima of the derivative light signal data and;

    comparing the values of the minima with a threshold value; and

    displaying an indicator on the charged particle beam image if the value of an individual local minimum is lower than the threshold value, the indicator showing the position of the charged particle beam when the amplitude of the detected light signal changes.

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