System and method for simultaneous detection of secondary electrons and light in a charged particle beam system

• US 9,494,516 B2
• Filed: 05/26/2015
• Issued: 11/15/2016
• Est. Priority Date: 01/30/2011
• Status: Active Grant

• Current Assignee: FEI Company (Thermo Fisher Scientific Incorporated)
• Original Assignee: FEI Company (Thermo Fisher Scientific Incorporated)
• Inventors: Parker, N. William, Utlaut, Mark W.
• Primary Examiner(s): MCCORMACK, JASON L
• Application Number:
  US14/721,775
• Publication Number:
  US 20150369737A1
• Time in Patent Office: 539 Days
• Field of Search: 250/306, 250/307, 250/310, 250/311, 250/492.1, 250/492.2, 250/492.3
• US Class Current: 1/1
• CPC Class Codes: G01N 21/6428 Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" in vivo A61B5/00; immunoassay G01N33/53
• CPC Class Codes: G01N 21/6458 Fluorescence microscopy fluorescence microscopes per se G02B21/0076 and G02B21/16
• CPC Class Codes: G01N 21/6486 Measuring fluorescence of biological material, e.g. DNA, RNA, cells G01N21/6428 takes precedence
• CPC Class Codes: G01N 23/225 using electron or ion
• CPC Class Codes: H01J 2237/206 Modifying objects while observing
• CPC Class Codes: H01J 2237/2443 Scintillation detectors
• CPC Class Codes: H01J 2237/24455 Transmitted particle detectors
• CPC Class Codes: H01J 2237/2448 Secondary particle detectors
• CPC Class Codes: H01J 2237/2803 characterised by the imaging method
• CPC Class Codes: H01J 2237/2857 Particle bombardment induced emission
• CPC Class Codes: H01J 37/228 whereby illumination or light collection take place in the same area of the discharge
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence
• CPC Class Codes: H01J 37/285 Emission microscopes, e.g. field-emission microscopes

Abstract

A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.

Claims

1. An image processing method for stored image data comprising:

directing a charged particle beam in a pattern across a region of a sample;

detecting charged particles emitted from the sample due to the impact of the charged particle beam to form a charged particle imaging signal;

forming a charged particle beam image using the charged particle imaging signal;

detecting light emitted from the region of the sample, the amplitude of the detected light signal over time forming a curve;

convolving the curve with a smoothing function to generate smoothed light signal data;

combining the smoothed light signal data with a derivative function to generate derivative light signal data;

determining values corresponding to local minima of the derivative light signal data and the position of the charged particle beam corresponding to the local minima of the derivative light signal data and;

comparing the values of the minima with a threshold value; and

displaying an indicator on the charged particle beam image if the value of an individual local minimum is lower than the threshold value, the indicator showing the position of the charged particle beam when the amplitude of the detected light signal changes.

2. The method of claim 1 in which detecting light emitted from the region of the sample comprises detecting light from a multiplicity of different types of light sources within the region of the sample.

3. The method of claim 2, wherein the multiplicity of different types of light sources includes more than 100 light sources.

4. The method of claim 2, wherein the multiplicity of different types of light sources includes enough light sources that the change in total light emission from the extinguishment of one light source is less than 3 σ

of the noise in the light signal.

5. The method of claim 1, wherein the smoothing function is a Gaussian or binomial function.

6. A method for image processing image data comprising:

directing a charged particle beam in a pattern across a region of a sample;

detecting charged particles emitted from the sample due to the impact of the charged particle beam to form a charged particle beam image;

detecting light emitted from a multiplicity of light sources in the region of the sample, the amplitude of the detected light signal over time having random changes and non-random changes;

convolving the light signal with a smoothing function, producing a convolved light signal;

identifying locations in the light image which represent non-random changes in the light signal; and

displaying markers on the charged particle image, the location of the marker representing the location of said non-random change in the light signal.

7. The method of claim 6, wherein identifying non-random changes in the light signal comprises identifying local minima or maxima in the derivative of the amplitude of the light signal.

8. The method of claim 6, wherein the light and charged particle emissions are detected simultaneously.

9. The method of claim 6, wherein the non-random change in the amplitude of the light signal is due to interaction of the charged particle beam with one or more of the multiplicity of light sources.

10. The method of claim 9, wherein the non-random change in the amplitude of the light signal corresponds to the extinguishment of one of the multiplicity of light sources by the charged particle beam.

11. The method of claim 6, wherein convolving the light signal with a smoothing signal further comprises convolving the light signal with a Gaussian or binomial function.

12. The method of claim 6, wherein convolving the light signal with a smoothing function further comprises taking the derivative of the result.

13. The method of claim 6, wherein convolving the light signal with a smoothing function further comprises convolving the derivative of a smoothing function to the light signal.

14. The method of claim 6, wherein convolving the light signal with a smoothing function further comprises applying a smoothing function having an optimized full width at half maximum.

15. The method of claim 6, wherein the multiplicity of light sources further comprises more than 100 light sources.

16. The method of claim 15, wherein the multiplicity of light sources further comprises more than 10000 light sources.

17. The method of claim 6, wherein the multiplicity of light sources further comprises enough light sources that the change in total light emission from the extinguishment of one light source is less than 3 σ

of the noise in the light signal.

18. The method of claim 6, wherein the light sources are fluorescent proteins.

19. The method of claim 6, wherein the light sources are quantum dots.

20. The method of claim 6, wherein the light is emitted from the sample as a result of irradiation by the charged particle beam.