Conductive nanoparticles
First Claim
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1. A method of forming an apparatus, the method comprising:
- forming a dielectric in an integrated circuit on a substrate;
forming, after forming the dielectric, conductive nanoparticles on the formed dielectric, the conductive nanoparticles formed by a plasma-assisted deposition process such that each conductive nanoparticle is isolated from the other conductive nanoparticles, wherein forming conductive nanoparticles includes forming iridium;
forming, after forming the conductive nanoparticles, a capping dielectric on and contacting the formed conductive nanoparticles and contacting the dielectric, the capping dielectric providing isolation from conductive elements; and
configuring the conductive nanoparticles as charge storage elements.
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Abstract
Isolated conductive nanoparticles on a dielectric layer and methods of fabricating such isolated conductive nanoparticles provide charge storage units in electronic structures for use in a wide range of electronic devices and systems. The isolated conductive nanoparticles may be used as a floating gate in a flash memory. In an embodiment, conductive nanoparticles are deposited on a dielectric layer by a plasma-assisted deposition process such that each conductive nanoparticle is isolated from the other conductive nanoparticles to configure the conductive nanoparticles as charge storage elements.
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Citations
15 Claims
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1. A method of forming an apparatus, the method comprising:
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forming a dielectric in an integrated circuit on a substrate; forming, after forming the dielectric, conductive nanoparticles on the formed dielectric, the conductive nanoparticles formed by a plasma-assisted deposition process such that each conductive nanoparticle is isolated from the other conductive nanoparticles, wherein forming conductive nanoparticles includes forming iridium; forming, after forming the conductive nanoparticles, a capping dielectric on and contacting the formed conductive nanoparticles and contacting the dielectric, the capping dielectric providing isolation from conductive elements; and configuring the conductive nanoparticles as charge storage elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification