Microelectronic packages having axially-partitioned hermetic cavities and methods for the fabrication thereof

• US 9,499,397 B2
• Filed: 03/31/2014
• Issued: 11/22/2016
• Est. Priority Date: 03/31/2014
• Status: Expired due to Fees

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Inventors: Bowles, Philip H., Hooper, Stephen R.
• Primary Examiner(s): CHOUDHRY, MOHAMMAD M
• Application Number:
  US14/230,273
• Publication Number:
  US 20150274515A1
• Time in Patent Office: 967 Days
• US Class Current: 1/1
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2207/07 Interconnects
• CPC Class Codes: B81B 2207/09 Packages
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence

Abstract

Microelectronic packages and methods for producing microelectronic packages are provided. In one embodiment, the method includes bonding a first Microelectromechanical Systems (MEMS) die having a first MEMS transducer structure thereon to a cap piece. The first MEMS die and cap piece are bonded such that a first hermetically-sealed cavity is formed enclosing the first MEMS transducer. A second MEMS die having a second MEMS transducer structure thereon is further bonded to one of the cap piece and the second MEMS die. The second MEMS die and the cap piece are bonded such that a second hermetically-sealed cavity is formed enclosing the second MEMS transducer. The second hermetically-sealed cavity contains a different internal pressure than does the first hermetically-sealed cavity.

Claims

1. A method for fabricating a microelectronic package, comprising:

bonding a first Microelectromechanical Systems (MEMS) die having a first MEMS transducer structure thereon to a cap piece such that a first hermetically-sealed cavity is formed enclosing the first MEMS transducer;

bonding a second MEMS die having a second MEMS transducer structure thereon to one of the cap piece and the second MEMS die such that a second hermetically-sealed cavity is formed enclosing the second MEMS transducer, the second hermetically-sealed cavity containing a different internal pressure than does the first hermetically-sealed cavity;

removing a portion of the second MEMS die and the cap piece overlying a bond pad shelf on the first MEMS die to reveal the bond pad shelf and a plurality of bonds pads thereon; and

forming wire bonds in contact with the plurality of bonds to electrically interconnect the first MEMS die with the second MEMS die.

2. The method of claim 1 wherein the first MEMS die, the second MEMS die, and the cap piece are bonded in wafer form to produce a wafer stack;

and

wherein the method further comprises singulating the wafer stack to produce the microelectronic packages along with a plurality of other microelectronic packages.

3. The method of claim 1 wherein the first MEMS transducer structure comprises a gyroscope transducer structure, wherein the second MEMS transducer structure comprises an accelerometer transducer structure, and wherein the first hermetically-sealed cavity contains an internal pressure less than the second MEMS transducer structure.

4. The method of claim 1 wherein the first cap piece is bonded to the second MEMS die such that an Application Specific Integrated Circuit formed on the cap piece is exposed to the pressure within the second hermetically-sealed cavity.

5. The method of claim 4 wherein the second MEMS transducer structure comprises a gyroscope transducer structure, and wherein the pressure within the second hermetically-sealed cavity is less than the pressure within the first hermetically-sealed cavity.

6. The method of claim 1 wherein the first MEMS die is bonded to the cap piece utilizing a first bonding material, and wherein the second MEMS die is bonded to one of the cap piece and the second MEMS die utilizing a second bonding material different than the first bonding material.

7. The method of claim 6 wherein the first bonding material has a greater bonding temperature than does the second bonding material.

8. The method of claim 1 wherein the second MEMS die is bonded to the cap piece opposite the first MEMS die such that the first and second MEMS die are stacked in a face-to-face relationship.

9. The method of claim 1 wherein the second MEMS die is bonded to the first MEMS die such that the first and second MEMS die are stacked in a face-to-back relationship.

10. The method of claim 9 further comprising etching a recess into the backside of the second MEMS die prior to bonding to the first MEMS die, the recess enlarging the volume of the first hermetically-sealed cavity.

11. The method of claim 1 further comprising forming electrical connections to through silicon vias formed through at least one of the first and second MEMS die to interconnect the first and second MEMS die with an input/out interface accessible from the exterior of the microelectronic package.

12. A method for fabricating microelectronic packages, comprising:

bonding a first wafer to a second wafer to produce a two wafer stack comprising a first array of Microelectromechanical Systems (MEMS) transducer structures enclosed by a first plurality of hermetic cavities each containing a first predetermined pressure;

bonding a third wafer to the two wafer stack to produce a three wafer stack comprising a second array of MEMS transducer structures enclosed by a second plurality of hermetic cavities each containing a second predetermined pressure different than the first predetermined pressure; and

singulating the three wafer stack into a plurality of die-cap stacks each including axially-partitioned hermetic cavities enclosing different MEMS transducer structures and containing different internal pressures.

13. The method of claim 12 wherein the first array of MEMS transducer structures are formed on the first wafer, wherein the second array of MEMS transducer structures are formed on the third wafer, and wherein third wafer is bonded to the second wafer opposite the first wafer to produce the three wafer stack.

14. The method of claim 12 wherein the first array of MEMS transducer structures are formed on the first wafer, wherein the second array of MEMS transducer structures are formed on the third wafer, and wherein third wafer is bonded to the first wafer opposite the second wafer to produce the three wafer stack.

15. The method of claim 12 wherein the first wafer is bonded to the second wafer utilizing a first electrically-conductive bonding material, and wherein the second wafer is bonded to the two wafer stack utilizing a second electrically-conductive bonding material having a lower bonding temperature than does the first electrically-conductive bonding material.

16. The method of claim 12 wherein the first array of MEMS structures is formed on the first wafer, and wherein the second array of MEMS structures is formed on one of the second and third wafers.

17. The method of claim 12 wherein, for each of the plurality of die-cap stacks defined by singulation of the three wafer stack, the axially-partitioned hermetic cavities overlap vertically as taken along a centerline of the die-cap stack.

18. The method of claim 13 wherein, for each of the plurality of die-cap stacks defined by singulation of the three wafer stack, the axially-partitioned hermetic cavities are partitioned by a singulated piece of one of the second and third wafers.

19. A method for fabricating a microelectronic package, comprising:

bonding a first Microelectromechanical Systems (MEMS) die having a first MEMS transducer structure thereon to a cap piece such that a first hermetically-sealed cavity is formed enclosing the first MEMS transducer;

bonding a second MEMS die having a second MEMS transducer structure thereon to the first MEMS die such that the first and second MEMS die are stacked in a face-to-back relationship and such that a second hermetically-sealed cavity is formed enclosing the second MEMS transducer, the second hermetically-sealed cavity containing a different internal pressure than does the first hermetically-sealed cavity; and

etching a recess into the backside of the second MEMS die prior to bonding to the first MEMS die, the recess enlarging the volume of the first hermetically-sealed cavity.

20. The method of claim 19 wherein the first MEMS die, the second MEMS die, and the cap piece are bonded in wafer form to produce a wafer stack;

and

wherein the method further comprises singulating the wafer stack to produce the microelectronic packages along with a plurality of other microelectronic packages.