Scanning interferometry technique for through-thickness evaluation in multi-layered transparent structures

• US 9,500,468 B2
• Filed: 08/24/2015
• Issued: 11/22/2016
• Est. Priority Date: 08/25/2014
• Status: Active Grant

• Current Assignee: The Board of Trustees of Michigan State University (Michigan State University)
• Original Assignee: The Board of Trustees of Michigan State University (Michigan State University)
• Inventors: Khomenko, Anton S., Haq, Mahmoodul, Cloud, Gary L.
• Primary Examiner(s): Lapage, Michael P
• Application Number:
  US14/833,843
• Publication Number:
  US 20160054116A1
• Time in Patent Office: 456 Days
• US Class Current: 1/1
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers
• CPC Class Codes: G01L 1/24 by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
• CPC Class Codes: G01N 2021/8438 Mutilayers
• CPC Class Codes: G01N 2021/8867 using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
• CPC Class Codes: G01N 21/8851 Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002

Abstract

A multi-layer transparent composite detection technique includes producing two beams from a single, low-coherence source, a test beam and a reference beam, and scanning the reference beam to determine, with high precision, the depths of flaws (e.g., delaminations, bubbles, inclusions or other reflective or scattering objects) within a specimen or test object. The techniques combine light back-reflected or back-scattered from an internal flaw or interface with light in a reference path to identify such features and locations.

Claims

1. A method of scanning a multi-layered specimen, the method comprising:

receiving a coherent radiation beam and separating the coherent radiation beam into an object beam and a reference beam, the object beam and the reference beam being coherent with one another;

directing the object beam at the specimen and collecting a resulting sampled beam from the specimen, wherein the sampled beam comprises reflected radiation from the specimen and/or backscattered radiation from the specimen;

maintaining the reference beam along a reference beam path and free from incidence on the specimen, and scanning the reference beam along different optical path lengths of the reference beam path, wherein the scanning of the reference beam is along a reference axis coinciding with an axis into the specimen and over a depth region into the specimen;

combining the sampled beam with the reference beam to produce an interferometric intensity signal or pattern, where, as a result of the scanning of the reference beam, the interferometric pattern contains amplitude peaks that are caused by reflection or scattering from discontinuities at different depths within the depth region of the specimen;

identifying, in a signal processing machine, the depth positions, within the specimen, of each of the discontinuities from the positions of the amplitude peaks in the interferometric pattern, wherein the discontinuities represent fiducial markers within the specimen;

determining, in the signal processing machine, a distance between at least two of the fiducial markers;

deforming the specimen in at least one direction;

identifying, in the signal processing machine, updated depth positions, within the specimen, of the at least two fiducial markers; and

determining, in the signal processing machine, an updated distance between the at least two fiducial markers.

2. The method of claim 1, the method further comprising:

identifying, in the signal processing machine, a layer within the multi-layer specimen that corresponds to the each of the discontinuities.

3. The method of claim 1, wherein the discontinuities are an air gap in the multi-layer specimen or a delamination defect in the multi-layer specimen.

4. The method of claim 1, the method further comprising:

scanning the object beam across a two-dimensional area of the specimen to collect the sampled beam over the two-dimensional area;

identifying the discontinuities in the multi-layered specimen, in response to the scanning of the object beam and the scanning of the reference beam; and

determining a three-dimensional position of each of the identified discontinuities and determining a three-dimensional size of each of the identified discontinuities.

5. The method of claim 1, wherein scanning the reference beam along the different optical path lengths of the reference beam path comprises:

providing a coarse-increment level scanning of the reference beam to allow for larger scans along the reference axis and a fine-increment level scanning of the reference beam for smaller scans along the reference axis.

6. The method of claim 5, the method further comprising:

automatically selecting between coarse-increment level scanning and fine-increment level scanning based on changes in the interferometric pattern.

7. The method of claim 1, the method further comprising:

forming a signal balancing beam from the coherent radiation beam; and

performing noise signal balancing on the interferometric pattern using the signal balancing beam.

8. The method of claim 1, wherein a coherence length of the coherent radiation beam is between 1 micrometer and 1 millimeter.

9. The method of claim 1, the method further comprising:

determining a change in gage length for the multi-layered specimen from the distance and the updated distance; and

determining strain, in the at least one direction, for the multi-layered specimen.

10. The method of claim 1, the method further comprising:

deforming the multi-layered specimen in a plurality of directions;

determining a change in gage length for the multi-layered specimen from the distance and the updated distance and for each of the plurality of directions; and

determining strain, in each of the plurality of directions, for the multi-layered specimen.

11. An apparatus for scanning a multi-layered specimen, the apparatus comprising:

a beam splitter positioned to receive a coherent radiation beam and configured to separate the coherent radiation beam into an object beam and a reference beam, the object beam and the reference beam being coherent with one another;

a specimen scanning stage configured to direct the object beam at the specimen and collect a resulting sampled beam from the specimen, wherein the sampled beam comprises reflected radiation from the specimen and/or backscattered radiation from the specimen;

a reference beam stage having a scanning mirror and configured (i) to maintain the reference beam along a reference beam path and free from incidence on the specimen and (ii) to scan the reference beam along different optical path lengths of the reference beam path, wherein the scanning of the reference beam is along a reference axis coinciding with an axis into the specimen and over a depth region into the specimen; and

a signal processing machine configured to, in response to combining the sampled beam with the reference beam and producing an interferometric pattern, where, as a result of the scanning of the reference beam, the interferometric pattern contains amplitude peaks corresponding to discontinuities at different depths within the depth region of the specimen, and (ii) to

(i) analyze the interferometric pattern to identify discontinuities in the specimen from the peaks in the interferometric pattern,

(ii) identify the depth positions, within the specimen, of each of the discontinuities from the positions of the amplitude peaks in the interferometric pattern, wherein the discontinuities represent fiducial markers within the specimen,

(iii) determine a distance between at least two of the fiducial markers;

(iv) in response to deforming the specimen in at least one direction, identify updated depth positions, within the specimen, of the at least two fiducial markers; and

(v) determine an updated distance between the at least two fiducial markers.

12. The apparatus of claim 11, wherein the signal processing machine is configured to identify a layer within the multi-layer specimen that corresponds to the each of the discontinuities.

13. The apparatus of claim 11, wherein the discontinuities are an air gap in the multi-layer specimen or a delamination defect in the multi-layer specimen.

14. The apparatus of claim 11, wherein the specimen scanning stage comprises an X-axis scanning element and a Y-axis scanning element to scan the object beam across a two-dimensional area of the specimen to collect the sampled beam over the two-dimensional area.

15. The apparatus of claim 14, wherein the signal processing machine is configured to (i) identify the discontinuities in the multi-layered specimen, in response to the scanning of the object beam and the scanning of the reference beam, (ii) determine a three-dimensional position of each of the identified discontinuities, and (iii) determine a three-dimensional size of each of the identified discontinuities.

16. The apparatus of claim 11, the apparatus further comprising:

the scanning mirror in the reference beam path; and

a beam tracking and alignment stage that implements angular alignment and motion of the scanning mirror using (i) a coarse-increment level scanning of the reference beam to allow for larger scans along the reference axis and (ii) a fine-increment level scanning of the reference beam for smaller scans along the reference axis.

17. The apparatus of claim 16, wherein the beam tracking and alignment stage comprises a beam monitoring device coupled to monitor at least a portion of combined reference beam and object beam to establish coincidence of the reference beam and the object beam, wherein the beam tracking and alignment stage is coupled to the signal processing machine and configured to selectively move between coarse-increment level scanning and fine-increment level scanning in response to control from the signal processing machine.

18. The apparatus of claim 11, the apparatus further comprising:

a signal balancing stage coupled to form a signal balancing beam from the coherent radiation beam, wherein the signal processing machine is configured to perform noise signal balancing on the interferometric pattern using the signal balancing beam.

19. The apparatus of claim 11, wherein the signal processing machine is further configured to:

(vi) determine a change in gage length for the specimen from the distance and the updated distance; and

(vii) determine strain, in the at least one direction, for the specimen.