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Micro electro mechanical system

  • US 9,500,666 B2
  • Filed: 02/26/2014
  • Issued: 11/22/2016
  • Est. Priority Date: 08/18/2008
  • Status: Active Grant
First Claim
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1. A micro electro mechanical system, comprising:

  • a sensor element, comprising;

    a first spring system including a first fixed portion and a first elastically-deformable beam connected to the first fixed portion and extending therefrom in a first direction,a second spring system including a second fixed portion and a second elastically-deformable beam connected to the second fixed portion and extending therefrom in a second direction opposite to the first direction,a third spring system including a third fixed portion and a third elastically-deformable beam connected to the third fixed portion and extending therefrom in a third direction,a fourth spring system including a fourth fixed portion and a fourth elastically-deformable beam connected to the fourth fixed portion and extending therefrom in a fourth direction opposite to the third direction, anda movable body, movable in a moving direction, suspended from the first fixed portion via the first beam, suspended from the second fixed portion via the second beam, suspended from the third fixed portion via the third beam, and suspended from the fourth fixed portion via the fourth beam,wherein the first and second spring systems are arranged on one side of a virtual line extending in the moving direction through a center of the sensor element, the third and fourth spring systems are arranged on the other side of the virtual line, and, when the movable body is displaced in the moving direction, tensile stresses are generated within the first, second, third and fourth spring systems at the same time.

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