MEMS-based display apparatus
First Claim
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1. An apparatus comprising:
- a substrate;
a layer of material arranged over a surface of the substrate and attached to the substrate, the layer of material including an aperture; and
an electromechanical light modulator arranged between the layer of material and the substrate and aligned with the aperture, the electromechanical light modulator including a movable shutter, a first beam attached to the movable shutter, a second beam supported over the substrate, andwherein the first beam and the second beam are configured such that, in response to an application of a voltage across the first and second beams, the first beam is drawn toward the second beam causing the movable shutter to move in a plane of motion which is substantially parallel to the layer of material.
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Abstract
A display apparatus incorporating electromechanical light modulators and a layer of material including apertures corresponding to the electromechanical light modulators that results in the display apparatus having lower power-consumption.
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Citations
18 Claims
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1. An apparatus comprising:
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a substrate; a layer of material arranged over a surface of the substrate and attached to the substrate, the layer of material including an aperture; and an electromechanical light modulator arranged between the layer of material and the substrate and aligned with the aperture, the electromechanical light modulator including a movable shutter, a first beam attached to the movable shutter, a second beam supported over the substrate, and wherein the first beam and the second beam are configured such that, in response to an application of a voltage across the first and second beams, the first beam is drawn toward the second beam causing the movable shutter to move in a plane of motion which is substantially parallel to the layer of material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification