Method of manufacturing optical image stabilizer

• US 9,502,464 B2
• Filed: 05/09/2014
• Issued: 11/22/2016
• Est. Priority Date: 06/04/2010
• Status: Expired due to Fees

• Current Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Original Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Inventors: Lee, Seung Seoup
• Primary Examiner(s): Alanko, Anita
• Application Number:
  US14/273,695
• Publication Number:
  US 20140248737A1
• Time in Patent Office: 928 Days
• US Class Current: 1/1
• CPC Class Codes: B81C 1/0015 Cantilevers switches using MEMS H01H1/0036; electrostatic relays using micromechanics H01H59/0009; microelectro-mechanical resonators H03H9/02244
• CPC Class Codes: B81C 1/00158 Diaphragms, membranes manufacture process for semi-permeable inorganic membranes B01D67/0039
• CPC Class Codes: B81C 1/00166 Electrodes
• CPC Class Codes: B81C 1/00476 removing a sacrificial layer B81C1/00912 takes precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G03B 2205/0038 by displacing the image plane with respect to the optical axis in case of an electronic image sensor H04N23/68
• CPC Class Codes: H01L 27/1469 Assemblies, i.e. hybrid integration
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H04N 1/00307 with a mobile telephone apparatus constructional features of portable telephone sets H04M1/0202; mobile radio systems H04W84/00
• CPC Class Codes: H04N 23/54 Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
• CPC Class Codes: H04N 23/687 by shifting the lens or sensor position

Abstract

A method of manufacturing an optical image stabilizer including providing a silicon-on-insulator (SOI) substrate that includes first and second silicon each provided on an upper surface and a lower surface of the substrate, having an insulator layer therebetween, forming a table, a cantilever arm connected to the table, an anchor connected to the cantilever arm, and an electrode opposite to the cantilever arm by etching the first silicon, allowing the table and the cantilever arm to levitate from the second silicon by removing an insulator layer disposed under the table and the cantilever arm, and mounting an image sensor on the table.

Claims

1. A method of manufacturing an optical image stabilizer, comprising:

providing a silicon-on-insulator (SOI) substrate that includes first and second silicon each provided on an upper surface and a lower surface of the substrate, having an insulator layer therebetween;

forming a table, a cantilever arm connected to the table, an anchor connected to the cantilever arm, and an electrode opposite to the cantilever arm by etching the first silicon;

allowing the table and the cantilever arm to levitate from the second silicon by removing an insulator layer disposed under the table and the cantilever arm; and

mounting an image sensor on the table.

2. The method of manufacturing an optical image stabilizer according to claim 1, wherein the electrode has a curved surface, while being opposite to the cantilever arm.

3. The method of manufacturing an optical image stabilizer according to claim 1, wherein the forming the table, the cantilever arm connected to the table, the anchor connected to the cantilever arm, and the electrode opposite to the cantilever arm by etching the first silicon further includes forming stoppers disposed on the second silicon corresponding to each edge of the table and limiting the movable region of the table.