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Fully differential capacitive architecture for MEMS accelerometer

  • US 9,506,946 B2
  • Filed: 06/03/2014
  • Issued: 11/29/2016
  • Est. Priority Date: 03/14/2013
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • towing a streamer behind a survey vessel in a body of water, wherein the streamer includes an accelerometer;

    detecting, by at least four capacitors within the accelerometer, a change in acceleration of the accelerometer, wherein;

    the four capacitors include a first capacitor and a second capacitor on a first side of a proof mass and a third capacitor and a fourth capacitor on a second side of the proof mass, and each of the four capacitors includes a respective pair of electrodes; and

    in response to the proof mass moving in a selected direction, a capacitance of the first and second capacitors is operable to increase, and a capacitance of the third and fourth capacitors is operable to decrease; and

    determining an acceleration of the accelerometer based at least in part on the detecting.

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