Apparatus providing simplified alignment of optical fiber in photonic integrated circuits

• US 9,507,104 B2
• Filed: 04/20/2016
• Issued: 11/29/2016
• Est. Priority Date: 01/02/2013
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Sandhu, Gurtej, Meade, Roy, Bi, Lei, Smythe, John
• Primary Examiner(s): Lepisto, Ryan
• Assistant Examiner(s): Chiem, Erin
• Application Number:
  US15/134,167
• Publication Number:
  US 20160231519A1
• Time in Patent Office: 223 Days
• Field of Search: None
• US Class Current: 1/1
• CPC Class Codes: G02B 6/30 for use between fibre and thin-film device
• CPC Class Codes: G02B 6/32 having lens focusing means positioned between opposed fibre ends with lens being an integral part of the single fibre end G02B6/262
• CPC Class Codes: G02B 6/4204 the coupling comprising intermediate optical elements, e.g. lenses, holograms encapsulated active devices H01S5/02208, H01L33/52
• CPC Class Codes: G02B 6/4206 Optical features G02B6/4207, G02B6/421 take precedence
• CPC Class Codes: G02B 6/4225 by a direct measurement of the degree of coupling, e.g. the amount of light power coupled to the fibre or the opto-electronic element
• CPC Class Codes: G02B 6/4226 Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
• CPC Class Codes: G02B 6/4227 Active alignment methods, e.g. procedures and algorithms
• CPC Class Codes: G02B 6/4239 Adhesive bonding; Encapsulation with polymer material
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/49 Method of mechanical manufacture

Abstract

A structure for optically aligning an optical fiber to a photonic device and method of fabrication of same. The structure optically aligns an optical fiber to the photonic device using a lens between the two which is moveable by actuator heads. The lens is moveable by respective motive sources associated with the actuator heads.

Claims

1. A method fabricating an optical alignment structure, the method comprising:

fabricating on a photonic integrated circuit;

an alignment lens;

three cantilever arms, each containing a respective actuator head at a free end;

a respective motive source associated with the respective actuator heads for causing movement of the lens;

a photonic device; and

an optical fiber holding structure arranged such that the lens is in an optical path between an optical fiber attached to the optical fiber holding structure and the photonic device.

2. A method as in claim 1, wherein the motive source comprises a respective piezoelectric structure for causing movement of a respective actuator head.

3. A method as in claim 2, wherein each piezoelectric structure causes a bending movement of a respective cantilever arm to move a respective actuator head.

4. A method as in claim 3, wherein each piezoelectric structure is provided on a respective cantilever arm.

5. A method as in claim 1, wherein two of the actuator heads are fabricated to support opposite sides of the lens from below and are provided with a downwardly sloping inclined area for engaging with the lens.

6. A method as in claim 5, wherein the inclined area comprises a planar area.

7. A method as in claim 5, wherein the inclined area comprises a curved area.

8. A method as in claim 5, wherein the inclined area comprises a series of steps.

9. A method as in claim 1, further comprising:

fabricating on the photonic integrated circuit a light detector for detecting light received by at least one of the photonic device and an optical fiber attached to the holding structure.

10. A method as in claim 9, further comprising fabricating a control system on the photonic integrated circuit which receives light from the light detector and controls the motive sources for moving the actuator heads.