Variable orifice type pressure-controlled flow controller
First Claim
1. A variable orifice type pressure-controlled flow controller, comprising:
- a pressure control unit; and
a variable orifice unit including,a direct touch type metal diaphragm valve having a valve seat and a diaphragm,an orifice formed of a ring-shaped clearance between the valve seat of the direct touch type metal diaphragm valve and the diaphragm,an orifice opening degree arithmetic and control unit,a stepping motor operably connected to be driven in response to an orifice control signal from the orifice opening degree arithmetic and control unit,an eccentric cam operably connected to be turned by the stepping motor,a diaphragm presser, anda direct touch type metal diaphragm valve having a valve opening degree arranged to be controlled by the eccentric cam via the diaphragm presser;
wherein the variable orifice type pressure-controlled flow controller is arranged tocompute a flow rate of a fluid distributed through the orifice of the variable orifice unit according to the formula QP1=KP1 (wherein P1 is an orifice upstream side pressure and K is a constant), andswitch a flow control range, andperform flow control in a predetermined flow control range by changing a set flow rate signal QS for the flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal QZ for an orifice opening degree arithmetic and control unit of the variable orifice unit,wherein the eccentric cam of the variable orifice unit further includesa rotary shaft body to which a motor shaft is fixed vertically so that the motor shaft is eccentric by a predetermined distance from a center of the rotary shaft body,a first bearing fixed to the outer peripheral surface of the rotary shaft body,a flange-shaped cam plate fixed to the outer peripheral surface of the first bearing, andwherein the cam plate is movable by the predetermined distance in the left-right direction in a non-rotating state by turning the rotary shaft body.
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Accused Products
Abstract
In a variable orifice type pressure-controlled flow controller that includes a pressure control unit and a variable orifice unit, computes a flow rate of a fluid distributed through an orifice of the variable orifice unit as QP1=KP1 (P1 is an orifice upstream side pressure and K is a constant), and switches a flow control range and performs flow control in the flow control range by changing a set flow rate signal Qs for a flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal Qz for an orifice opening degree arithmetic and control unit of the variable orifice unit, the variable orifice unit includes the orifice opening degree arithmetic and control unit.
46 Citations
11 Claims
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1. A variable orifice type pressure-controlled flow controller, comprising:
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a pressure control unit; and a variable orifice unit including, a direct touch type metal diaphragm valve having a valve seat and a diaphragm, an orifice formed of a ring-shaped clearance between the valve seat of the direct touch type metal diaphragm valve and the diaphragm, an orifice opening degree arithmetic and control unit, a stepping motor operably connected to be driven in response to an orifice control signal from the orifice opening degree arithmetic and control unit, an eccentric cam operably connected to be turned by the stepping motor, a diaphragm presser, and a direct touch type metal diaphragm valve having a valve opening degree arranged to be controlled by the eccentric cam via the diaphragm presser; wherein the variable orifice type pressure-controlled flow controller is arranged to compute a flow rate of a fluid distributed through the orifice of the variable orifice unit according to the formula QP1=KP1 (wherein P1 is an orifice upstream side pressure and K is a constant), and switch a flow control range, and perform flow control in a predetermined flow control range by changing a set flow rate signal QS for the flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal QZ for an orifice opening degree arithmetic and control unit of the variable orifice unit, wherein the eccentric cam of the variable orifice unit further includes a rotary shaft body to which a motor shaft is fixed vertically so that the motor shaft is eccentric by a predetermined distance from a center of the rotary shaft body, a first bearing fixed to the outer peripheral surface of the rotary shaft body, a flange-shaped cam plate fixed to the outer peripheral surface of the first bearing, and wherein the cam plate is movable by the predetermined distance in the left-right direction in a non-rotating state by turning the rotary shaft body. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A variable orifice type pressure-controlled flow controller, comprising:
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a pressure control unit; a variable orifice unit including, a direct touch type racial diaphragm valve having a valve seat and a diaphragm, an orifice formed of a ring-shaped clearance between the valve seat of the direct touch type metal diaphragm valve and the diaphragm, an orifice opening degree arithmetic and control unit, a stepping motor operably connected to be driven in response to an orifice control signal from the orifice opening degree arithmetic and control unit, an eccentric cam operably connected to be turned by the stepping motor, a diaphragm presser, and a direct touch type metal diaphragm valve having a valve opening degree arranged to be controlled by the eccentric cam via the diaphragm presser; wherein the variable orifice type pressure-controlled flow controller is arranged to compute a flow rate of a fluid distributed through the orifice of the variable orifice unit according to the formula QP1=KP1 (wherein P1 is an orifice upstream side pressure and K is a constant), and switch a flow control range, and perform flow control in a predetermined flow control range by changing a set flow rate signal Qs for the flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal Qz for an orifice opening degree arithmetic and control unit of the variable orifice unit; and a control unit including the flow rate arithmetic and control unit of the pressure control unit and the orifice opening degree arithmetic and control unit of the variable orifice unit; wherein the control unit is arranged to, when the set flow rate signal changes according to switching of the flow control range, input an orifice opening signal into the orifice opening degree arithmetic and control unit simultaneously with the change in the set flow rate signal to increase the orifice opening degree of the variable orifice unit, and, after a predetermined time elapses, input a predetermined orifice opening degree setting signal into the orifice opening degree arithmetic and control unit to keep the orifice opening degree at the desired predetermined opening degree. - View Dependent Claims (8, 9, 10)
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11. A variable orifice type pressure-controlled flow controller, comprising:
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a pressure control unit; a variable orifice unit including, a direct touch type metal diaphragm valve having a valve seat and a diaphragm, an orifice formed of a ring-shaped clearance between the valve seat of the direct touch type metal diaphragm valve and the diaphragm, an orifice opening degree arithmetic and control unit, a stepping motor operably connected to be driven in response to an orifice control signal from the orifice opening degree arithmetic and control unit, an eccentric cam operably connected to be turned by the stepping motor, a diaphragm presser, and a direct touch type metal diaphragm valve having a valve opening degree arranged to be controlled by the eccentric cam via the diaphragm presser, wherein the variable orifice type pressure-controlled flow controller is arranged to compute a flow rate of a fluid distributed through the orifice of the variable orifice unit according to the formula QP1=KP1 (wherein P1 is an orifice upstream side pressure and K is a constant), and switch a flow control range, and perform flow control in a predetermined flow control range by changing a set flow rate signal Qs for the flow rate arithmetic and control unit of the pressure control unit and an orifice opening degree setting signal Qz for an orifice opening degree arithmetic and control unit of the variable orifice unit; and a control unit including the flow rate arithmetic and control unit of the pressure control unit and the orifice opening degree arithmetic and control unit of the variable orifice unit, wherein the control unit is arranged to, when the set flow rate signal changes according to switching of the flow control range, input an orifice opening signal into the orifice opening degree arithmetic and control unit simultaneously with the change in the set flow rate signal to increase the orifice opening degree of the variable orifice unit, and, after a predetermined time elapses, input a predetermined orifice opening degree setting signal into the orifice opening degree arithmetic and control unit to keep the orifice opening degree at the desired predetermined opening degree, and wherein the variable orifice opening degree is kept at a degree being 1.5 times or more larger than the opening degree in the set flow rate range for 0.1 to 0.5 seconds, and the lowering time from the 100% set flow rate to a 20% set flow rate during flow control is within 1 second.
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Specification