Plasma processing chamber with flexible symmetric RF return strap

• US 9,508,530 B2
• Filed: 11/21/2012
• Issued: 11/29/2016
• Est. Priority Date: 11/21/2011
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Dhindsa, Rajinder, Kellogg, Mike
• Primary Examiner(s): Moore, Karla
• Assistant Examiner(s): KENDALL, BENJAMIN R
• Application Number:
  US13/684,098
• Publication Number:
  US 20130133834A1
• Time in Patent Office: 1,469 Days
• US Class Current: 1/1
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/32541 Shape
• CPC Class Codes: H01J 37/32715 Workpiece holder
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/6831 using electrostatic chucks

Abstract

Chambers for processing semiconductor wafers are provided. One such chamber includes an electrostatic chuck having a surface for supporting a substrate. A ground assembly is provided that surrounds a periphery of the electrostatic chuck. The ground assembly includes a first annular part and a second annular part and a space between the first annular part and the second annular part. A conductive strap having flexibility is provided. The conductive strap is annular and has a curved cross-sectional shape with a first end and a second end. The conductive strap is disposed in the space such that the first is electrically connected to the first annular part and the second end is electrically connected to the second annular part. The curved cross-sectional shape has an opening that faces away from the electrostatic chuck when the annular conductive strap is in the space.

Claims

1. A chamber for processing semiconductor wafers, comprising:

an electrostatic chuck having a surface for supporting a substrate;

a ground assembly surrounding a periphery of the electrostatic chuck, the ground assembly including a first annular part and a second annular part and a space between the first annular part and the second annular part; and

a conductive strap having flexibility, the conductive strap being annular and having a curved cross-sectional C-shape with a first end and a second end, the conductive strap disposed in the space such that the first end is electrically connected to the first annular part and the second end is electrically connected to the second annular part, wherein the curved cross-sectional C-shape has an opening that faces away from the electrostatic chuck and toward a surround wall of the chamber and the conductive strap remains within the space;

wherein the first annular part has an L shape in cross-section and the second annular part has an L shape in cross-section, wherein a long side of the L shapes define a tubular portion and a short side of the L shapes define extensions that are parallel to each other and the short side of both of the L shapes of the first and second annular parts face in a same direction that is away from the electrostatic chuck and toward the surround wall of the chamber, wherein the space is between the short sides of the L shapes that define the extensions;

wherein the first and second annular parts of the ground assembly are disposed below a perforated plasma confinement ring, and the L shape of the first annular part is configured to move vertically up toward the perforated plasma confinement ring and move vertically down away from the perforated plasma confinement ring.

2. The chamber of claim 1, wherein the conductive strap includes a plurality of fingers, where each finger extends between the first end and the second end of the curved cross-sectional C-shape.

3. The chamber of claim 1, wherein the first end and second end of the curved cross-sectional C-shape are respectively clamped to the first and second annular parts of the ground assembly.

4. The chamber of claim 1, wherein the conductive strap having flexibility will compress when the first annular part moves vertically down and extend when the first annular part moves vertically up, wherein first end of the curved cross-sectional C-shape is clamped by screws to the first annular part and the second end of the curved cross-sectional C-shape is clamped by screws to the second annular part.

5. The chamber of claim 1, wherein the conductive strap is defined from sheet metal copper.

6. The chamber of claim 1, wherein the conductive strap provides a conductive path between the first annular part that is proximate to a region of plasma and the second annular part that couples to ground of a chamber wall of the chamber.

7. The chamber of claim 1, wherein the tubular portion of the first and second annular parts are parallel to dielectric rings of a focus ring assembly, the focus ring assembly immediately surrounding the electrostatic chuck and the ground assembly surrounding the focus ring assembly.

8. The chamber of claim 1, wherein RF power is supplied to the electrostatic chuck and RF current is returned at least partially by the ground assembly and the conductive strap.

17. The chamber of claim 1, wherein the perforated plasma confinement ring provides for conductance of gases out of a process volume of the chamber, the conductive strap remaining within the space avoids obstruction to the conductance of gases out of the process volume during operation.

9. A chamber, comprising:

an electrostatic chuck having a surface for supporting a substrate;

a focus ring assembly surrounding a periphery of the electrostatic chuck;

a ground assembly surrounding a periphery of the focus ring assembly, the ground assembly including a first annular part and a second annular part and a space between the first annular part and the second annular part; and

a conductive strap having flexibility, the conductive strap being annular and having a curved cross-sectional C-shape with a first end and a second end, the conductive strap disposed in the space such that the first end is electrically connected to the first annular part and the second end is electrically connected to the second annular part, wherein the curved cross-sectional C-shape has an opening that faces away from the electrostatic chuck and toward a surrounding wall of the chamber and the conductive strap remains within the space;

wherein the first annular part has an L shape in cross-section and the second annular part has an L shape in cross-section, wherein a long side of the L shapes define a tubular portion and a short side of the L shapes define extensions that are parallel to each other and the short side of both of the L shapes of the first and second annular parts face in a same direction that is away from the electrostatic chuck and toward the surrounding wall of the chamber, wherein the space is between the short sides of the L shapes that define the extensions;

wherein the first and second annular parts of the ground assembly are disposed below a perforated plasma confinement ring that provides for conductance of gases out of a process volume of the chamber, the conductive strap remaining within the space avoids obstruction to the conductance of gases out of the process volume during operation;

wherein the L shape of the first annular part is configured to move vertically up toward the perforated plasma confinement ring and move vertically down away from the perforated plasma confinement ring.

10. The chamber of claim 9, wherein the conductive strap includes a plurality of fingers, where each finger extends between the first end and the second end of the curved cross-sectional C-shape.

11. The chamber of claim 9, wherein the first end and second end of the curved cross-sectional C-shape are respectively clamped to the first and second annular parts of the ground assembly.

12. The chamber of claim 9, wherein the conductive strap having flexibility will compress when the first annular part moves vertically down and extend when the first annular part moves vertically up, wherein first end of the curved cross-sectional C-shape is clamped by screws to the first annular part and the second end of the curved cross-sectional C-shape is clamped by screws to the second annular part.

13. The chamber of claim 9, wherein the conductive strap is defined from sheet metal copper.

14. The chamber of claim 9, wherein the conductive strap provides a conductive path between the first annular part that is proximate to a region of plasma during processing and the second annular part that couples to ground of a chamber wall of the chamber.

15. The chamber of claim 9, wherein the tubular portion of the first and second annular parts are parallel to dielectric rings of the focus ring assembly, the focus ring assembly immediately surrounding the electrostatic chuck and the ground assembly surrounding the focus ring assembly.

16. The chamber of claim 9, wherein an etching operation is performed by the chamber to make at least one aspect of a finished integrated circuit device.