Method of depositing a diffusion barrier for copper interconnect applications

• US 9,508,593 B1
• Filed: 06/30/2015
• Issued: 11/29/2016
• Est. Priority Date: 03/13/2001
• Status: Expired due to Term

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Rozbicki, Robert T., Danek, Michal, Klawuhn, Erich R.
• Primary Examiner(s): Payen, Marvin
• Assistant Examiner(s): Stevenson, Andre C
• Application Number:
  US14/755,800
• Time in Patent Office: 518 Days
• US Class Current: 1/1
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01L 21/02043 Cleaning before device manufacture, i.e. Begin-Of-Line process
• CPC Class Codes: H01L 21/76805 the opening being a via or contact hole penetrating the underlying conductor
• CPC Class Codes: H01L 21/76807 for dual damascene structures
• CPC Class Codes: H01L 21/76843 formed in openings in a dielectric
• CPC Class Codes: H01L 21/76844 Bottomless liners
• CPC Class Codes: H01L 21/76846 Layer combinations
• CPC Class Codes: H01L 21/7685 the layer covering a conductive structure H01L21/76849 takes precedence
• CPC Class Codes: H01L 21/76862 Bombardment with particles, e.g. treatment in noble gas plasmas; UV irradiation
• CPC Class Codes: H01L 21/76865 Selective removal of parts of the layer H01L21/76844 takes precedence
• CPC Class Codes: H01L 21/76883 Post-treatment or after-treatment of the conductive material

Abstract

The present invention pertains to methods for forming a metal diffusion barrier on an integrated circuit wherein the formation includes at least two operations. The first operation deposits barrier material via PVD or CVD to provide some minimal coverage. The second operation deposits an additional barrier material and simultaneously etches a portion of the barrier material deposited in the first operation. The result of the operations is a metal diffusion barrier formed in part by net etching in certain areas, in particular the bottom of vias, and a net deposition in other areas, in particular the side walls of vias. Controlled etching is used to selectively remove barrier material from the bottom of vias, either completely or partially, thus reducing the resistance of subsequently formed metal interconnects.

Claims

1. An apparatus for depositing a metal-containing material on a wafer substrate, comprising:

a chamber adapted to receive a wafer substrate, wherein the wafer substrate comprises at least one via comprising a bottom portion and at least one trench, and an exposed metal at the bottom portion of the at least one via;

a DC power source;

a deposition source adapted to supply metal-containing material upon application of DC power by said DC power source;

wherein the application of DC power to the deposition source results in deposition of a first portion of the metal-containing material at least over the bottom portion of the at least one via;

an RF power source adapted to apply RF power to the wafer substrate;

wherein the application of DC power to the deposition source and RF power to the wafer substrate results in etching away the first portion of the metal-containing material at the bottom portion of the at least one via with energetic gas ions such that an E/D (etch rate to deposition rate) ratio is greater than 1 at the bottom of the at least one via without fully etching through to partially remove the first portion of the metal-containing material such that a part of the first portion of the metal-containing material is removed from the bottom portion of the at least one via, such that the resistance of subsequently formed interconnects is reduced relative to that of interconnects formed using the first portion of the metal-containing material prior to etching, while simultaneously depositing a second portion of the metal-containing material in the trench and/or field on the wafer substrate.

2. The apparatus of claim 1, wherein the deposition of the first portion of the metal-containing material and the etching away of the first portion of the metal-containing material at the bottom of the at least one via without fully etching through to partially remove the first portion of the metal-containing material while simultaneously depositing a second portion of the metal containing material in the trench and/or field on the wafer substrate both occur in the same processing tool.

3. The apparatus of claim 2, wherein the deposition of the first portion of the metal-containing material and the etching away of the first portion of the metal-containing material at the bottom of the at least one via without fully etching through to partially remove the first portion of the metal-containing material while simultaneously depositing a second portion of the metal containing material in the trench and/or field on the wafer substrate both occur in the same chamber.

4. The apparatus of claim 1, further comprising a source of argon gas.

5. The apparatus of claim 1, further comprising an electromagnetic coil adapted to control field shape and plasma flux.

6. The apparatus of claim 1, wherein the DC power source is adapted to apply a power of between about 10 and 30 kW to the deposition source during deposition of the first portion of the metal-containing material at least over the bottom portion of the at least one via.

7. The apparatus of claim 1, wherein the DC power source is adapted to apply a power of about 18 kW to the deposition source during deposition of the first portion of the metal-containing material at least over the bottom portion of the via.

8. The apparatus of claim 1, wherein the DC power source is capable of applying a power of about 1-10 kW to the deposition source during the etching away of a portion of the first portion of the metal-containing material and simultaneous deposition of a second portion of the metal-containing material.

9. The apparatus of claim 1, wherein the DC power source is capable of applying a power of about 3 kW to the deposition source during the etching away of a portion of the first portion of the metal-containing material and simultaneous deposition of a second portion of the metal-containing material.

10. The apparatus of claim 1, wherein the RF power source is adapted to provide an RF frequency of between about 100 kHz and 50 MHz.

11. The apparatus of claim 10, wherein the RF power source is adapted to provide an RF frequency of about 13.56 MHz.

12. The apparatus of claim 1, wherein the deposition source is a material selected from tantalum and titanium.

13. The apparatus of claim 1, wherein the deposition source is a hollow-cathode magnetron.

14. The apparatus of claim 4, wherein the source of argon gas is adapted to provide an argon flow rate of about 10 to 300 SCCM.

15. The apparatus of claim 4, wherein the source of argon gas is adapted to provide a pressure of 0.1-100 mTorr.

16. The apparatus of claim 15, wherein the pressure is about 8 mTorr.

17. The apparatus of claim 1, wherein at least one via is unlanded.

18. The apparatus of claim 1, wherein the DC power source and the RF power source are adapted so that the ratio of RF power to DC power is adjusted to etch the first portion of the metal-containing material at the bottom of the at least one via with energetic inert gas ions without fully etching through to partially remove the first portion of the metal-containing material such that a part of the first portion of the metal-containing material remains at the bottom of the at least one via and a part of the first portion of the metal-containing material is removed from the bottom of the at least one via such that the resistance of subsequently formed interconnects is reduced relative to that of interconnects formed using the first portion of the metal-containing material prior to etching, while simultaneously depositing a second portion of the metal-containing material in the trench and/or field on the wafer substrate.

19. The apparatus of claim 1, wherein the application of DC power to the deposition source that results in deposition of a first portion of the metal-containing material at least over the bottom portion of the at least one via comprises applying a bilayer having a first deposited layer and a second deposited layer thereon.

20. The apparatus of claim 1, wherein the application of DC power to the deposition source and RF power to the wafer substrate results in a PVD etch/deposition process in which an RF frequency is applied to the wafer substrate such that the etch rate at the bottom of the at least one via is greater than the etch rate on any associated horizontal trench surfaces or the field.

21. The apparatus of claim 1, further comprising a controller to control the DC power source and the RF power source so as to result in an etching away the first portion of the metal-containing material at the bottom portion of the at least one via with energetic gas ions without fully etching through to partially remove the first portion of the metal-containing material such that a portion of the first portion of the metal-containing material is removed from the bottom portion of the via, such that the resistance of subsequently formed interconnects is reduced relative to that of interconnects formed using the first portion of the metal-containing material prior to etching, while simultaneously depositing a second portion of the metal-containing material in the trench and/or field on the wafer substrate.