Mass transfer tool
First Claim
Patent Images
1. A mass transfer tool comprising:
- an articulating transfer head assembly including an electrostatic voltage source connection, the electrostatic voltage source connection to electrically connect with an array of electrostatic transfer heads, wherein the articulating transfer head assembly includes a mounting surface, the mounting surface to hold a substrate supporting the array of electrostatic transfer heads against the electrostatic voltage source connection;
a carrier substrate holder; and
an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder.
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Accused Products
Abstract
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool includes an articulating transfer head assembly, a carrier substrate holder, and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. The articulating transfer head assembly may include an electrostatic voltage source connection and a substrate supporting an array of electrostatic transfer heads.
138 Citations
18 Claims
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1. A mass transfer tool comprising:
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an articulating transfer head assembly including an electrostatic voltage source connection, the electrostatic voltage source connection to electrically connect with an array of electrostatic transfer heads, wherein the articulating transfer head assembly includes a mounting surface, the mounting surface to hold a substrate supporting the array of electrostatic transfer heads against the electrostatic voltage source connection; a carrier substrate holder; and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A mass transfer tool, comprising:
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an articulating transfer head assembly including an electrostatic voltage source connection, the electrostatic voltage source connection to electrically connect with an array of electrostatic transfer heads; a carrier substrate holder; and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder, wherein the actuator assembly is to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder in at least six degrees of freedom. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A mass transfer tool, comprising:
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an articulating transfer head assembly including an electrostatic voltage source connection, the electrostatic voltage source connection to electrically connect with an array of electrostatic transfer heads; a carrier substrate holder; an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder; a fiducial mark; a first imaging device fixed relative to the articulating transfer head assembly and moveable relative to the fiducial mark, wherein the first imaging device includes a first imaging plane; and a second imaging device fixed relative to the carrier substrate holder, wherein the second imaging device includes a second imaging plane, and wherein the fiducial mark is located between the first imaging plane and the second imaging plane. - View Dependent Claims (18)
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Specification