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Processing a sacrificial material during manufacture of a microfabricated product

  • US 9,511,560 B2
  • Filed: 04/13/2012
  • Issued: 12/06/2016
  • Est. Priority Date: 04/13/2012
  • Status: Active Grant
First Claim
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1. A method for processing a sacrificial material of an intermediate microfabricated product, the method comprising:

  • forming a hydrogen-containing and nitrogen-containing carbon layer as the sacrificial material on a surface of a base structure, wherein the forming occurs in a hydrocarbon-nitrogen atmosphere;

    forming a structural layer on at least a portion of a surface of the hydrogen-containing and nitrogen-containing carbon layer, wherein the structural layer is a flexible membrane; and

    oxidizing the hydrogen-containing and nitrogen-containing carbon layer to release the structural layer to define an air gap between the flexible membrane and the base structure.

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