MEMS device calibration
First Claim
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1. A MEMS device, comprising:
- a cavity having an internal environment;
a seal isolating the internal environment from an external environment outside the MEMS device,wherein the seal is susceptible to damage in response to a calibration unsealing energy, wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment, wherein the seal is a fusible link, and wherein the fusible link can damage the seal in response to an electrical current;
a calibration circuit capable of measuring a parameter of the internal environment before and after damage to the seal; and
a channel coupling a corner of the cavity to the seal.
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Abstract
One example discloses a MEMS device, including: a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device; wherein the seal is susceptible to damage in response to a calibration unsealing energy; wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment; and a calibration circuit capable of measuring the internal environment before and after damage to the seal.
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Citations
23 Claims
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1. A MEMS device, comprising:
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a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device, wherein the seal is susceptible to damage in response to a calibration unsealing energy, wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment, wherein the seal is a fusible link, and wherein the fusible link can damage the seal in response to an electrical current; a calibration circuit capable of measuring a parameter of the internal environment before and after damage to the seal; and a channel coupling a corner of the cavity to the seal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method calibrating a MEMS device having a seal isolating an internal environment within the MEMS device from an external environment outside the MEMS device, comprising:
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measuring a parameter of the internal environment within the MEMS device before damage to the seal; damaging the seal with a calibration unsealing energy, wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment, wherein the seal is a fusible link, and wherein the fusible link can damage the seal in response to an electrical current; measuring a parameter of the internal environment after damage to the seal; and calibrating the MEMS device based on the measuring, wherein the seal includes a thermal isolation region which reduces a power of the unsealing energy required to damage the seal. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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21. A MEMS device, comprising:
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a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device, wherein the seal is susceptible to damage in response to a calibration unsealing energy, wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment, wherein the seal is a fusible link, and wherein the fusible link can damage the seal in response to an electrical current; and a calibration circuit capable of measuring a parameter of the internal environment before and after damage to the seal, wherein the seal includes a thermal isolation region which reduces a power of the unsealing energy required to damage the seal.
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22. A MEMS device, comprising:
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a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device, wherein the seal is susceptible to damage in response to a calibration unsealing energy, wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment, wherein the seal is a fusible link, and wherein the fusible link can damage the seal in response to an electrical current; and a calibration circuit capable of measuring a parameter of the internal environment before and after damage to the seal, wherein the seal includes a wire and an isolation trench.
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23. A MEMS device, comprising:
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a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device, wherein the seal is susceptible to damage in response to a calibration unsealing energy, wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment, wherein the seal is a fusible link, and wherein the fusible link can damage the seal in response to an electrical current; a calibration circuit capable of measuring a parameter of the internal environment before and after damage to the seal; and a channel coupling the cavity to the seal, wherein the channel includes a main channel and at least one from a group consisting of;
a blocked side channel and a sharp corner.
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Specification