Ultra-compact, passive, varactor-based wireless sensor using quantum capacitance effect in graphene

• US 9,513,244 B2
• Filed: 04/13/2012
• Issued: 12/06/2016
• Est. Priority Date: 04/14/2011
• Status: Active Grant

• Current Assignee: Regents of The University of Minnesota (University of Minnesota)
• Original Assignee: Regents of The University of Minnesota (University of Minnesota)
• Inventors: Koester, Steven J.
• Primary Examiner(s): Whalen, Daniel
• Application Number:
  US14/111,753
• Publication Number:
  US 20140145735A1
• Time in Patent Office: 1,698 Days
• Field of Search: 257/E27.049, 257/E29.344, 257/E21.364, 438/379
• US Class Current: 1/1
• CPC Class Codes: G01N 27/221 by investigating the dielectric properties using microwaves G01N22/00; measuring loss factors or dielectric constants per se G01R27/26
• CPC Class Codes: G01N 27/227 Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors G01N27/225 takes precedence
• CPC Class Codes: G01R 27/2605 Measuring capacitance capacitive sensors G01D5/24
• CPC Class Codes: H01L 29/1025 Channel region of field-effect devices
• CPC Class Codes: H01L 29/1606 Graphene
• CPC Class Codes: H01L 29/42312 Gate electrodes for field effect devices
• CPC Class Codes: H01L 29/93 Variable capacitance diodes, e.g. varactors
• CPC Class Codes: H01L 31/085 the device being sensitive to very short wavelength, e.g. X-ray, Gamma-rays
• CPC Class Codes: H01L 31/115 Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation

Abstract

An electrical device includes at least one graphene quantum capacitance varactor. In some examples, the graphene quantum capacitance varactor includes an insulator layer, a graphene layer disposed on the insulator layer, a dielectric layer disposed on the graphene layer, a gate electrode formed on the dielectric layer, and at least one contact electrode disposed on the graphene layer and making electrical contact with the graphene layer. In other examples, the graphene quantum capacitance varactor includes an insulator layer, a gate electrode recessed in the insulator layer, a dielectric layer formed on the gate electrode, a graphene layer formed on the dielectric layer, wherein the graphene layer comprises an exposed surface opposite the dielectric layer, and at least one contact electrode formed on the graphene layer and making electrical contact with the graphene layer.

Claims

1. A sensor comprising:

a graphene quantum capacitance varactor having a graphene layer, wherein capacitance of the graphene layer changes in response to electrical charge collected proximate to the graphene layer; and

a readout circuit responsive to the capacitance of the graphene layer and configured to output a signal indicative of the electrical charge.

2. The sensor of claim 1, wherein the graphene quantum capacitance varactor further comprises:

an insulator layer, wherein the graphene layer is disposed on the insulator layer;

a dielectric layer disposed on the graphene layer;

a gate electrode formed on the dielectric layer; and

at least one contact electrode disposed on the graphene layer and making electrical contact with the graphene layer.

3. The sensor of claim 2,

wherein the sensor comprises a radiation sensor in which the insulator layer is responsive to ionizing radiation that creates trapped positive charge at an interface between the graphene layer and the insulator layer.

4. The sensor of claim 1, wherein the graphene quantum capacitance varactor comprises:

an insulator layer;

a gate electrode recessed in the insulator layer;

a dielectric layer formed on the gate electrode, wherein the graphene layer is formed on the dielectric layer, and wherein the graphene layer comprises an exposed surface opposite the dielectric layer; and

at least one contact electrode formed on the graphene layer and making electrical contact with the graphene layer.

5. The sensor of claim 4, wherein the graphene quantum capacitance varactor further comprises a protective insulator formed on the exposed surface of the graphene layer.

6. The sensor of claim 4, further comprising:

a linker molecule attached to an exposed surface of the graphene layer or a protective insulator formed on the exposed surface of the graphene layer; and

an enzyme attached to the linker molecule.

7. The sensor of claim 6, wherein the linker molecule comprises 1-pyrenebutanoic acid succinimidyl ester and the enzyme comprises glucose oxidase.

8. The sensor of claim 4, further comprising:

1,2-epoxy-3-phenoxypropane-derivated dextran (DexP) attached to the exposed surface of the graphene layer or a protective insulator formed on the exposed surface of the graphene layer; and

Concanavalin A (ConA) conjugated on the DexP.

9. The sensor of claim 1, wherein the at least one graphene quantum capacitance varactor has an equivalent oxide thickness (EOT) of less than about 5 nanometers (nm).

10. The sensor of claim 1, wherein the graphene quantum capacitance varactor has a capacitance modulation ratio of greater than about 1.2.

11. The sensor of claim 1, wherein the readout circuit comprises an inductor electrically connected to the graphene quantum capacitance varactor, wherein the inductor and the graphene quantum capacitance varactor form an LC oscillator circuit having a resonant frequency responsive to the electrical charge collected by the at least one graphene quantum capacitance varactor.

12. A sensor comprising:

a graphene quantum capacitance varactor having a graphene layer, wherein capacitance of the graphene layer changes in response to electrical charge external to the graphene layer, and

a multi-finger structure comprising at least two gate electrode fingers, and wherein each of the at least two gate electrode fingers is electrically connected in parallel with the others of the at least two gate electrode fingers.

13. A sensor having a graphene quantum capacitance varactor comprising:

an insulator layer defining a plurality of fingers, wherein a first finger of the plurality of fingers extends in a first direction within the insulator layer, and wherein a second finger of the plurality of fingers extends in a second direction substantially opposite to the first direction;

a gate electrode formed in the plurality of fingers;

a dielectric layer formed on the gate electrode;

a first graphene layer positioned over the first finger, wherein the first graphene layer comprises a first exposed surface opposite the dielectric layer;

a second graphene layer positioned over the second finger, wherein the second graphene layer comprises a second exposed surface opposite the dielectric layer;

at least one contact electrode formed on the first and second graphene layers and making electrical contact with the first and second graphene layers; and

glucose-sensitive molecules attached to at least one of the first exposed surface or the second exposed surface.

14. The electrical device of claim 13, wherein the glucose-sensitive molecules comprise at least one of:

1-pyrenebutanoic acid succinimidyl ester attached to at least one of the first graphene layer or second graphene layer, and glucose oxidase attached to the 1-pyrenebutanoic acid succinimidyl ester;

or

1,2-epoxy-3-phenoxypropane-derivated dextran (DexP) attached to at least one of the first exposed surface or the second exposed surface, and Concanavalin A (ConA) conjugated on the DexP.

15. A wireless sensing system comprising:

a sensor comprising;

a graphene quantum capacitance varactor comprising a graphene layer, wherein the capacitance of the graphene layer changes in response to electrical charge external to the graphene layer, and

a first inductor electrically connected to the graphene quantum capacitance varactor, wherein the first inductor and the graphene quantum capacitance varactor form an LC oscillator circuit having a resonant frequency responsive to a sense charge collected by the graphene quantum capacitance varactor; and

a second inductor electromagnetically coupled to the first inductor to produce a signal responsive to the resonant frequency of the LC oscillator.

16. A method of forming a sensor, the method comprising:

forming a graphene quantum capacitance varactor comprising a graphene layer, wherein the capacitance of the graphene layer changes in response to a sense charge collected proximate to the graphene layer upon exposure to a sample; and

coupling the graphene layer to a readout circuit responsive to the capacitance of the graphene layer and configured to output a signal indicative of the sense charge.

17. The method of claim 16, wherein coupling the graphene layer to the readout circuit comprises:

forming a first inductor including a first end and a second end;

electrically connecting the first end to the gate electrode and the second end to the contact electrode to form an LC oscillator circuit having a resonant frequency responsive to the sense charge; and

electromagnetically coupling a second inductor to the first inductor to produce a signal responsive to the resonant frequency of the LC oscillator.

18. The method of claim 16, wherein forming the graphene quantum capacitance varactor further comprises attaching a linker molecule attached to an exposed surface of the graphene layer or a protective insulator formed on the exposed surface of the graphene layer, wherein an enzyme is attached to the linker molecule.

19. The method of claim 16, wherein forming the graphene quantum capacitance varactor further comprises-attaching 1,2-epoxy-3-phenoxypropane-derivated dextran (DexP) to an exposed surface of the graphene layer or a protective insulator formed on the exposed surface of the graphene layer, wherein Concanavalin A (ConA) is conjugated on the DexP.