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High-sensitivity, z-axis micro-electro-mechanical detection structure, in particular for an MEMS accelerometer

  • US 9,513,310 B2
  • Filed: 03/20/2014
  • Issued: 12/06/2016
  • Est. Priority Date: 03/22/2013
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical detection structure, comprising:

  • a substrate having a first surface in a plane;

    a first anchorage element and a second anchorage element projecting from and fixed with respect to the substrate;

    a translating mass suspended over the substrate and moveable in a first direction that is transverse to the plane;

    first and second elastic anchorage elements;

    a first tilting mass coupled to the first anchorage element by the first elastic anchorage element, the first tilting mass including a first supporting mass and a first supporting arm, the supporting mass facing a first side of the translating mass, the first supporting arm facing at least a second side of the translating mass, the first mass being configured to rotate with respect to a first axis;

    a second tilting mass coupled to the second anchorage element by the second elastic anchorage element, the second tilting mass including a second supporting mass and a second supporting arm, the second supporting mass facing a third side of the translating mass, the second supporting arm facing at least a fourth side of the translating mass, the second mass being configured to rotate with respect to a second axis, the first and second axes being substantially parallel to each other;

    a fixed electrode facing at a distance at least one of the first and second tilting masses and the translating mass; and

    elastic supporting elements elastically coupling the translating mass to the first and second tilting masses, respectively.

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