High-sensitivity, z-axis micro-electro-mechanical detection structure, in particular for an MEMS accelerometer
First Claim
1. A micro-electro-mechanical detection structure, comprising:
- a substrate having a first surface in a plane;
a first anchorage element and a second anchorage element projecting from and fixed with respect to the substrate;
a translating mass suspended over the substrate and moveable in a first direction that is transverse to the plane;
first and second elastic anchorage elements;
a first tilting mass coupled to the first anchorage element by the first elastic anchorage element, the first tilting mass including a first supporting mass and a first supporting arm, the supporting mass facing a first side of the translating mass, the first supporting arm facing at least a second side of the translating mass, the first mass being configured to rotate with respect to a first axis;
a second tilting mass coupled to the second anchorage element by the second elastic anchorage element, the second tilting mass including a second supporting mass and a second supporting arm, the second supporting mass facing a third side of the translating mass, the second supporting arm facing at least a fourth side of the translating mass, the second mass being configured to rotate with respect to a second axis, the first and second axes being substantially parallel to each other;
a fixed electrode facing at a distance at least one of the first and second tilting masses and the translating mass; and
elastic supporting elements elastically coupling the translating mass to the first and second tilting masses, respectively.
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Accused Products
Abstract
A z-axis micro-electro-mechanical detection structure, having a substrate defining a plane and a suspended mass carried by two anchorage elements. The suspended mass includes a translating mass, suspended over the substrate, mobile in a transverse direction to the plane and arranged between the anchorage elements and two tilting masses, each of which is supported by the anchorage elements through respective elastic anchorage elements so as to be able to rotate with respect to respective oscillation axes. The oscillation axes are parallel to each other to enable a translation movement of the translating mass. Fixed electrodes face at a distance the tilting masses or the translating mass so as to be able to detect displacement of the suspended mass as a result of external forces. Elastic supporting elements are arranged between the translating mass and the tilting masses to enable relative rotation between the translating mass and the tilting masses.
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Citations
22 Claims
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1. A micro-electro-mechanical detection structure, comprising:
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a substrate having a first surface in a plane; a first anchorage element and a second anchorage element projecting from and fixed with respect to the substrate; a translating mass suspended over the substrate and moveable in a first direction that is transverse to the plane; first and second elastic anchorage elements; a first tilting mass coupled to the first anchorage element by the first elastic anchorage element, the first tilting mass including a first supporting mass and a first supporting arm, the supporting mass facing a first side of the translating mass, the first supporting arm facing at least a second side of the translating mass, the first mass being configured to rotate with respect to a first axis; a second tilting mass coupled to the second anchorage element by the second elastic anchorage element, the second tilting mass including a second supporting mass and a second supporting arm, the second supporting mass facing a third side of the translating mass, the second supporting arm facing at least a fourth side of the translating mass, the second mass being configured to rotate with respect to a second axis, the first and second axes being substantially parallel to each other; a fixed electrode facing at a distance at least one of the first and second tilting masses and the translating mass; and elastic supporting elements elastically coupling the translating mass to the first and second tilting masses, respectively. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 22)
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12. A micro-electro-mechanical sensor, comprising:
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a MEMS detection structure that includes; a substrate having a first surface in a plane; a first anchorage element and a second anchorage element projecting from and fixed with respect to the substrate; a translating mass suspended over the substrate and moveable in a first direction that is transverse to the plane; first and second elastic anchorage elements; a first tilting mass and a second tilting mass, the first tilting mass being coupled to the first anchorage element by the first elastic anchorage element, the second tilting mass being coupled to the second anchorage element by the second elastic anchorage element, the first mass being configured to rotate with respect to a first axis and the second mass being configured to rotate with respect to a second axis, the first and second axes being substantially parallel to each other, the first tilting mass including a first supporting mass and a first supporting arm, the second tilting mass including a second supporting mass and a second supporting arm, the first supporting mass coupled to the first anchorage element, the second supporting mass coupled to the second anchorage element, the first supporting arm extending from the first supporting mass towards and around part of a periphery of the translating mass, the second supporting arm extending from the second supporting mass towards and around part of the periphery of the translating mass; a fixed electrode facing at a distance at least one of the first and second tilting masses and the translating mass; and elastic supporting elements elastically coupling the translating mass to the first and second tilting masses, respectively, the elastic supporting elements extending between the translating mass and the first and second supporting arms, respectively; and a read-interface circuit electrically coupled to the MEMS detection structure. - View Dependent Claims (13, 14, 15, 16)
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17. An electronic device comprising:
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a micro-electro-mechanical sensor including; a MEMS detection structure that includes; a substrate having a first surface in a first plane; a first and second anchorage elements coupled to the substrate; a translating mass suspended over the substrate and moveable in a first direction that is transverse to the plane; elastic anchorage elements; a first tilting mass coupled to the first anchorage element by one or more of the elastic anchorage elements, the first mass being configured to rotate with respect to a first axis, the first tilting mass including a first supporting mass and a first supporting arm, the first supporting mass extending along a first side of the translating mass, the first supporting arm extending along at least a second side of the translating mass; a second tilting mass coupled to the second anchorage element by one or more of the elastic anchorage elements, the second mass being configured to rotate with respect to a second axis, the second tilting mass including a a second supporting mass and a second supporting arm, the second supporting mass extending along a third side of the translating mass, the second supporting arm extending along at least a fourth side of the translating mass, the first and second axes forming a second plane that is substantially parallel to the first plane; fixed electrodes located on the first surface of the substrate and facing at a distance at least one of the first and second tilting masses and the translating mass; and elastic supporting elements elastically coupling the translating mass to a respective one of the first and second tilting masses; and a read-interface circuit electrically coupled to the MEMS detection structure; and a microprocessor unit electrically coupled to the read-interface circuit. - View Dependent Claims (18, 19, 20, 21)
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Specification