Systems and methods for fabricating displacement scales
First Claim
Patent Images
1. A system comprising:
- one or more rollers having a plurality of total internal reflection (TIR) prism features in negative relief;
a substrate having a major surface, the one or more rollers being rotatable when in contact or in close proximity to the substrate;
a displacement scale comprising a plurality of TIR prisms formed on the major surface of the substrate, the TIR prisms corresponding to the TIR prism features in negative relief of the one or more rollers, each of the TIR prisms being discrete and disconnected with each other along a longitudinal direction of the substrate;
a light source to direct light toward the displacement scale on the substrate;
one or more photosensors positioned to receive light from the substrate; and
a reticle positioned adjacent to the displacement scale on the substrate, the reticle including at least one reticle window and at least one light blocking region adjacent to the at least one reticle window,wherein the plurality of TIR prisms are configured to reflect a portion of the light directed from the light source, andwherein the substrate is movable relative to the light source and the reticle such that the displacement scale on the substrate and the reticle are capable of modulating the light received by the one or more photosensors to generate an output signal, and a position processor is configured to receive the output signal and determine the position of the substrate.
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Abstract
Methods and systems for forming a displacement scale comprising TIR prisms on a substrate are described. A system for forming the displacement scale includes one or more rollers having a pattern of total internal reflection (TIR) prism features in negative relief. As the rollers are rotated, the scale is formed on the substrate. The rollers may also include pattern features in negative relief. Rotation of the rollers simultaneously forms the displacement scale and the pattern features on the substrate. The TIR prism features of the displacement scale may be oriented to provide measurement of one or more of lateral displacement, longitudinal displacement and angular displacement.
69 Citations
28 Claims
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1. A system comprising:
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one or more rollers having a plurality of total internal reflection (TIR) prism features in negative relief; a substrate having a major surface, the one or more rollers being rotatable when in contact or in close proximity to the substrate; a displacement scale comprising a plurality of TIR prisms formed on the major surface of the substrate, the TIR prisms corresponding to the TIR prism features in negative relief of the one or more rollers, each of the TIR prisms being discrete and disconnected with each other along a longitudinal direction of the substrate; a light source to direct light toward the displacement scale on the substrate; one or more photosensors positioned to receive light from the substrate; and a reticle positioned adjacent to the displacement scale on the substrate, the reticle including at least one reticle window and at least one light blocking region adjacent to the at least one reticle window, wherein the plurality of TIR prisms are configured to reflect a portion of the light directed from the light source, and wherein the substrate is movable relative to the light source and the reticle such that the displacement scale on the substrate and the reticle are capable of modulating the light received by the one or more photosensors to generate an output signal, and a position processor is configured to receive the output signal and determine the position of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of forming a displacement scale comprising TIR prisms on a flexible substrate, comprising:
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bringing the substrate into contact or close proximity with one or more rollers having total internal reflection (TIR) prism features in negative relief; rotating the one or more rollers relative to the substrate so that a displacement scale comprising a plurality of TIR prisms is formed on a surface of the flexible substrate, the plurality of TIR prisms being discrete and disconnected with each other along a longitudinal direction of the substrate; providing a reticle adjacent to the displacement scale on the substrate and between the substrate and one or more photosensors, the reticle including at least one reticle window and at least one light blocking region adjacent to the at least one reticle window; directing light, via a light source, toward the flexible substrate having the plurality of TIR prisms, wherein the plurality of TIR prisms are configured to reflect a portion of the light, and the light is modulated by the plurality of TIR prisms and the reticle; sensing, via the one or more photosensors, the modulated light to generate an output signal; receiving, via a position processor, the output signal; and determining the position of the flexible substrate, wherein the substrate is movable relative to the light source and the reticle such that the displacement scale on the substrate and the reticle are capable of modulating the light received by the one or more photosensors. - View Dependent Claims (19, 20, 21, 22)
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23. A system comprising:
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a roller having total internal reflection (TIR) features in negative relief and pattern features in negative relief, the TIR features in negative relief including a plurality of prisms in negative relief, the roller configured to simultaneously form a scale, comprising a plurality of TIR features and pattern features on a substrate when the roller is brought into contact or close proximity with the substrate, the TIR features including a plurality of prisms corresponding to the plurality of prisms in negative relief of the roller, the plurality of prisms being configured to reflect a portion of light directed toward the scale on the substrate, the adjacent prisms on the substrate being separated by a distance d along a longitudinal direction of the substrate, and the adjacent prisms on the substrate having respective peaks with a distance p therebetween along the longitudinal direction; and a reticle positioned adjacent to the scale on the substrate, the reticle including at least one reticle window and at least one light blocking region, wherein the substrate is movable relative to the reticle. - View Dependent Claims (24, 25, 26, 27, 28)
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Specification