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Display apparatus including MEMS devices

  • US 9,513,529 B2
  • Filed: 08/20/2013
  • Issued: 12/06/2016
  • Est. Priority Date: 08/20/2013
  • Status: Active Grant
First Claim
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1. A display apparatus, comprising:

  • one or more micro-electro-mechanical system (MEMS) devices, wherein at least one of the MEMS devices includes;

    a first electrode including a partially reflective surface;

    a second electrode including a partially or completely reflective surface and disposed substantially parallel to the first electrode; and

    an analog actuation arrangement coupled to the first electrode, the second electrode or both the first and second electrodes to cause movement of the first electrode from a start position to a selected one of a plurality of end positions, responsive to a selected application of an actuation voltage, to cause the at least one MEMS device to selectively output a reflection of light in a selected wavelength or no reflection of the light,wherein the at least one MEMS device further includes a reflectance control panel disposed underneath the second electrode, wherein the reflectance control panel includes a reflective plate and an additional electrode configured to control reflectance of the reflective plate.

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